MEMS Actuators Reliable actuators are critical components in most MEMS devices. Well-known for developments in electrostatic comb- drive actuation [1] , Sandia also uses thermal actuators [2] extensively. This page provides a look at some of the common actuators used in MEMS at Sandia. Thermal Actuators V-Shaped Thermal Actuators The v-shaped thermal actuator shown in the figure below is commonly referred to as a "chevron", or "bent-beam" thermal actuator. It is used in applications requiring high force and reliability. These actuators are based on the constrained thermal expansion of the angled beams (a result of Jouleheating when a current is passed through the legs of the actuator), resulting in motion of the center shuttle in the direction shown by the arrow in the figure. V-shaped thermal actuator for on-chip inplane high-force linear-motion actuation. Thermal Ratcheting Actuator The Thermal Ratcheting Actuator (ThRA), is a V-shaped actuator attached to a ratcheting hub that provides a drive capable of high-force 360+ degree rotational motion.
Reliable actuators are critical components in most MEMS devices.
Well-known for developments in electrostatic comb-drive
actuation[1],Sandiaalso uses thermal actuators[2]extensively. This
page provides a look at some of the common actuators used in MEMS
at Sandia.
Thermal ActuatorsV-Shaped Thermal ActuatorsThe v-shaped thermal
actuator shown in the figure below is commonly referred to as a
"chevron", or "bent-beam" thermal actuator. It is used in
applications requiring high force and reliability. These actuators
are based on the constrained thermal expansion of the angled beams
(a result of Jouleheating when a current is passed through the legs
of the actuator), resulting in motion of the center shuttle in the
direction shown by the arrow in the figure.
V-shaped thermal actuator for on-chip inplane high-force
linear-motion actuation.Thermal Ratcheting ActuatorThe Thermal
Ratcheting Actuator(ThRA), is a V-shaped actuator attached to a
ratcheting hub that provides a drive capable of high-force 360+
degree rotational motion.
[3]Thermal ratcheting actuator.
Electrostatic ActuatorsTorsional Ratcheting Actuator (TRA)The
Torsional Ratcheting Actuator is used when high-torque rotational
motion is needed. Ratcheting allows full unidirectional 360+ degree
motion.
