CNU Planar Hall Resistance - KOCWelearning.kocw.net/contents4/document/wcu/2012/Chungnam/... ·...

CNU Planar Hall Resistance- Thermal stability & field sensitivity :

Indirect exchange coupling, FM/AFM

- Increasing active area :

Hybrid AMR/PHR sensor

- Wearable biochip sensor:

Flexible MR substrate

-Applications :

o Biochip sensors

o Single bead magnetometry

o Ferrofluid driplet

o Magnetic phase transition

V. Results Magnetoresistive effects

AMR/PHR

Voltage in magnetic materials

AMR/PHR

II. PHR

-Navel Research Lab.- 80x5 µm2 (GMR)- 1 bead (2.8 µm)- 2002 ( 1998)

-U. Bielefeld-70 µm diameter-3 beads (0.86 µm)-2002

-Stanford U. -1x1 µm2 (GMR)-1 bead (2.8 µm)-2002

- INESC-2x6 µm2 (GMR)-1 bead (2 µm)-2003

-Philips Research-3x100 µm2

-10 beads (300 nm)-2005

-IMEC-1 bead (300 nm)-2002

Review article in J.MMM, 293 (2005) 702

-Tokyo Inst. of Tech. - Hall effect in InSb-3x5 µm2 (2005)

IEEE . Magn. 41 (2005) 3661

- CNU -- PHR (2006)

GMR sensors

Giant magnetoresistance in magnetic multilayers《Nobel Prize in Physics (2007)》

Basic patent : US 2002/0119470 A1 (NRL), Sensor patents 13

Developed magnetic sensors II. PHR

Single layer (France)

Bilayers (Denmark)

Spin-valve Structure (Korea, 2006)

SiO2

TaNiFeIrMn

NiFe

SiO2

TaNiFeCu

NiFeIrMn

SiO2

NiFe

L. Ejsing, et. al. . Magn. Magn. Mater. 293, 677 (2005)

F. Nguyen Van Dau et. al, Sensors and Actuators A, 53, 256 (1996)

PHR sensor structure [~ 2009) II. PHR

Exchange bias in NiFe/Spacer/CoO bilayer

J. Gkemeijer et al., Phys. Rev. Lett., 79, 4270 (1997)

NiFe 30 nm

CoO 30 nm

Spacer

Motivation

CNU: Trilayer structure (2009)

Role of Antiferromagnetic layer

Enhancement of field sensitivity Enhancement of thermal stability

Reducing shunt current

cm 1.7 :Cucm 20 : NiFe

cm 210 :IrMn

III. Sensitivity

V/Oe 12 V/Oe 0.6 : S

valve)-(spin Oe 20(bilayers) Oe 125

ex

ex

HH V/Oe 0.6 V/Oe 9.0 : S

Cu1.2A) :(trilayers % 60valve)(spin % 30

active

active

II

10-2010-0054238 특허출원, T. Hung et al, JAP 107, 09E715 (2010)

ᄋNano-Micro-sezed sensor

: Localized information & approaching time

ᄋ Average over overall sample volume

Sensor arrays or Large sensor area

Active sensor area

R : Radius W : width

r

w

CNU hybrid PHR & AMR III. Sensitivity

- US2011/0175605A1- 한국출원번호 10-2010-0005657- S. Sun et al, Solid state commun. 2011

V/Oe 320 V/Oe 12 : S

Test Materials : NiFe(50 nm)/MnIr(10 nm)

Self-balancing (Whistone-bridge)

PHR effect

AMR effect

0 2 4 6 80.0

0.5

1.0

1.5

2.0

2.5

3.0

Out

put V

olta

ge (m

V)

R/w ratio of Ring

R : Radius W : width

R

w

-400 -300 -200 -100 0 100 200 300 400-1000

-500

0

500

1000

1500

Vol

tage

(V

)H (Oe)

r = 150 μmw = 20 μm

Ring type sensorTest Materials : NiCo(10 nm)/MnIr(10 nm)

Enhance the output signal with no hysteresis

AMR/PHR performance : ring type

Multi-ring sensor elements

Off-set adjustment

Flexible organic substrates

Embedded electrodes

Solar Energy Materials & Solar Cells 95 (2011) 1339

Printed electrodes

KN Eindhoven, The Netherlands

June ,2010 IEEE Xplore,KIMM, Korea

Flexible organic GMR substrates

(Co/Cu)n deposition on polyester

Appl. Phys. Lett. 69 (1992) 3092

Multilayers & electrode : Sputtering

Weak adhesion

Hybrid fabrication procedures

(c)(b)(a) PEN - bilayer

3.387 nm

glass - bilayer

694.671 pm

Si - bilayer

rms roughness -180.821 pm

AFM PEN (Polyethylene naphthalin) film stability

Temperature dependence of PHR

16 14 12 10 8 6 4 2 00

15

30

45

60

75

90

Distance,D (mm)

Ang

le,

()

PEN film bending

0 10 20 30 40 50 60 70 80 90-10

-5

0

5

10

15

20

25

Vol

tage

(mV

)

Angel,()

concave convex

D=16 mmD=8 mm

D=0 mm

D=16 mm D=8 mm D=0 mm

Electrode stability: Resistance variation

Electrode stability: Resistance variation

0 15 30 45 60 75 90-20

-15

-10

-5

0

5

10

15

20

Angel,()

Vol

tage

(mV

)

Au electrode

Ag paste

Contact lost

D=16 mm D=8 mm D=0 mm

-200 -150 -100 -50 0 50 100 150 200

-3

-2

-1

0

1

2

3

4 0 15 30 45 0

Vol

tage

(mV

)

Field (Oe)

Electrode stability: Resistance variation

0 100 200 300 400 500 600

0

2

4

6

8

10

Vol

tage

(V)

Time (sec)

0 200 4000.44

0.46

0.48

0.50

Θ = 15°

30°45°

0°

15°75°

60°

Multilayers electrodes : Ta/IrMn/NiFe/Ta/PEN

PEN film – Electrode (Au)

PEN film – Electrode - bend

0 20 40 60 80

0

100

200

300

400

Hig

ht (n

m)

um

약 200 nm

Magnetic sensor performanceResearch group Sensor type Size (μm2) Sensitivity

(μV/Oe·mA) Label size Biological detection

Molecular resolution

Stanford U. (Shan X. Wang)USA

Rectangle GMR (SV) Strip (32)

TMR

12 × 310 × 2.593 × 1.5

-

35.8-

2.8 μm (Dynabead)100 nm (SAF)

50 nm -3 μm (MNT)50 nm (Macs)

16 nm (MFe2O4)

NoYesNoYesNo

10 pM5 fM (2010)

(Protein)(Biosen. Bioelec. 25

(2010) 2051.)

INESC-MN(P. Freitas) Portugal

Rectangle GMR(SV) array (32)

TMR

80 × 2.540 × 2.515 × 2

35.842.4

130 nm250 nm2.8 μm

NoYesNo

1 fM(2002)(DNA)

(Biosen. Bioelec. 24 (2009) 2690.)

DTU(M. F. Hansen) Denmark PHR-Cross 10 × 10

40 × 40 3.2 2 and 2.8 μm(Dynabead) No

Bielefeld U.(Reiss) Germany

TMR(Elliptical) (20)

GMR (SV) spiral

0.4 × 0.11800(dia.)1(width)

-

16 and 50 nm(Co)2.0 μm

(Dynabead)350 nm and 860 nm

(Bangs)

NoYes

800 fM(2008)(Protein)

(Biosen. Bioelec. 19 (2004) 1149.)

U.Minnesota(J.P. Wang) USA GMR (SV) 80 × 40 600 12 nm (FeCo) Yes

~zM (2009)(Protein)

(Angew. Chem. Int. Ed. 48 (2009) 2764.)

NRL(M.M. Miller) USA AMR (Ring) 5 (dia)

3 (width) 15.2 4.3 μm (NiFe) No

SFIT(P.A. Besse) Swiss Silicon Hall sensor 2.4 × 2.4 17.5 2.8 μm

(Dynabead) No

CNU(C.G. Kim) Korea

PHRHybrid ring

3 × 3300 (dia)5 (width)

12.0

1690

1 and 2.8 μm(Dynabead) No

Philips Research Europe(W.U. Dittmer)

NetherlandsGMR (SV) Strip - - 300 and 500 nm

(Ademtech) Yes

0.8 pM(2008)(Protein)

(J. Immunological Meth. 338 (2008)

40.)

1D assay application (Cardiac Troponin I (cTnI)

Diffusion processAnalyte binding

-300 -250 -200

1.35

1.40

1.45

1.50

1.55

Base Signal Mag Bacteria_1 Mag Bacteria_2 Mag Bacteria_3 Mag bead Mag bead remove

Vol

tage

(V)

Field (Oe)

-300 -200 -100 0 100 200 300

0.0

0.5

1.0

1.5

2.0

0 50 100 150 200 250 300

1.44

1.46

1.48

1.50

1.52

Vol

tage

(mV

)

Time (sec)

Bacteria spay

Bead drop

Bead wash

2D assay: Bacteria detection

Magnetosomes

2D assays

The voltage change during the repeated drop and washing of bead

-fluidic channel integrated with sensor

Punch card( ~ 1980s)

See poster: p. 71

Nanosized Spin-Crossover Materials

TEM image of 250 ± 40 nm nanoparticles and the corresponding size histogram. (The largest dimension of each nanoparticle was used for the statistics.)

(a) The voltage change associated with change of properties of SCO particles. (b) The diamagnetic/paramagnetic phases are characterised by a lower/higher voltage. (c) The insets show the colour change of the particles: pink in diamagnetic low spin state (d) and white in the paramagnetic high spin phase. (b) Reflectance measurements ( = 550 ±40 nm) (e) of the [Fe(hptrz)3](OTs)2 SCO nanoparticles on the sensor surface.