vacuum

OPERATING INSTRUCTIONSGA05135_0502

MAG 2000 C, CTMAG W 2000 C, CTMAG W 2010 C, CHTMAG W 2011 CMAG 2000Turbomolecular Pumps with Magnetic Bearing

MAG.DRIVE 2000Electronic Frequency Converter

GA05135_0502 - 09/20042

Contents

Page

General safety information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

1 Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

1.1 System overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

1.2 Compatibility with pumped media . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

1.3 Design of the MAG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

1.4 Function and design of the MAG.DRIVE 2000 . . . . . . . . . . . . . . . . . . . . . . . . 12

1.5 Standard specification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

1.6 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

1.7 Ordering data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18

Pump configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

2.1 Unpacking - storing - transportation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

2.2 Operating environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

2.3 Connecting the MAG to the vacuum chamber . . . . . . . . . . . . . . . . . . . . . . . . 33

2.4 Connecting the backing pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36

2.5 Connecting the cooling water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

2.6 Connecting the purge gas. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43

2.7 Installing the MAG.DRIVE 2000. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50

2.7.1 Power supply connection X19. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52

2.7.2 Pump connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52

2.7.3 Control plug X14 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54

Emergency off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54

2.7.4 Interface connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56

3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59

3.1 General operation rules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59

3.2 Temperature Management System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61

3.3 Operation at high gas throughput or high forevacuum pressure . . . . . . . . . . . 63

3.4 Bakeout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63

3.5 Operation with the START and STOP keys . . . . . . . . . . . . . . . . . . . . . . . . . . . 64

3.6 Remote control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65

Section

GA05135_0502 - 09/2004 3

Contents

3.7 Operation with plug-in control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67

3.8 Operating statuses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68

3.9 Operating menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72

3.9.1 Basic menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72

3.9.2 Settings converter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73

3.9.3 Settings pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74

3.9.4 Settings temperature management system . . . . . . . . . . . . . . . . . . . . . . . . . . . 74

3.9.5 Settings purge / vent. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74

3.9.6 Total view of the menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75

4 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77

4.1 Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77

4.2 Changing the rotor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77

4.3 Changing the touch down bearings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77

4.4 Cleaning the frequency converter internally . . . . . . . . . . . . . . . . . . . . . . . . . . . 78

4.5 Removing the pump from the system . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78

4.6 Service at Leybold’s . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80

4.7 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80

5 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81

5.1 Warning messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82

5.2 Failure messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84

5.3 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90

EC Manufacturer’s Declaration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91

EC Conformance Declaration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92

Operating Instructions for MAG 2000 series . . . . . . . . . . . . . . . . . . . . . . . . . . 96

Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97

GA05135_0502 - 09/20044

Safety information

General safety information

Indicates procedures that must be strictly observed to prevent hazards topersons.

Indicates procedures that must be strictly observed to prevent damage to,or destruction of the MAG.

The Leybold MAG 2000 vacuum pump system is designed forsafe and efficient operation when used properly and in accordan-ce with this manual. It is the responsibility of the user to carefullyread and strictly observe all safety precautions described in thissection and throughout the manual. The turbomolecular pumpmust only be operated in the proper condition and underthe conditions described in the Operating Instructions. Itmust be operated and maintained by trained personnel only.Consult local, state, and national agencies regarding specificrequirements and regulations. Address any further safety, opera-tion and/or maintenance que-stions to your nearest LeyboldVacuum office.

Never expose any parts of the body to the vacuum.

The standard version of the equipment is not suited for operationin explosion hazard areas. Contact us before planning to use thepump under such circumstances.

The pump must be securely attached. If the pump should sud-denly seize, inadequate attachment could cause the pump tobreak away or allow internal pump parts to be discharged.

The rotor has to be changed after 40,000 hours of operation orafter 5000 starts/ stops at the latest. See also Section “3.3Operation at high gas throughput or high forevacuum pressure”.

Due to high-speed and temperature, the service life of the rotor islimited.

If the rotor is changed too late, it may be destroyed. Thus in theflange mounts high forces and torque conditions can occur.

The mounting screws for the pump may be torn off. Whenusing clamped flange connections at the housing or with compo-nents above the housing, sudden twisting of the entire pump canbe experienced.

Warning

Caution

Warning

Warning

Warning

GA05135_0502 - 09/2004 5

Safety information

Parts of the pump can become so hot during operation (> 70 °C,> 158 °F) that they represent a burn hazard:

Provide protection against contact with the hot components.

The converter has dangerous voltage levels.

Failure to strictly follow the instructions in this Manual can result indeath, severe bodily injuries or significant material damage.

Unauthorizes opening of the frequency converter voids the war-ranty.

Before opening the converter, always disconnect it from the mainsand the pump!

Before disconnecting any cables make sure that the converter isswitched off and the pump has come to a standstill.

When applying external voltage in excess of 42 V to terminals ofthe device, observe local safety regulations!

Unauthorized device conversion and modifications are prohibitedfor safety reasons.

Only suitably qualified personnel are permitted to work on thepump or converter. Personnel must be completely knowledgeableof all warning information and measures which are specified in thisInstruction manual for transporting, installing, and operating theunit.

Qualified personnel

Qualified electrical personnel in this instruction manual means a personwho has received electrical engineering instruction or is an electrical expertin accordance with EN 60204, Part 1, 3.30 respectivly 3.55.

The device contains electrostatically sensitive devices (ESD)!

Ensure that no items like bolts, nuts, washers, pieces of wire, forexample, enter into the inlet of the pump. Foreign objects whichenter into the pump will generally cause severe damage. Damagecaused by the intake of foreign objects is not covered by our war-ranty. For this reason always leave the supplied inlet screen inplace.

The equipment must not be exposed to drip or spray water.

Caution

Warning

Warning

Warning

Caution

GA05135_0502 - 09/20046

Figures The references to diagrams, e. g. (1/2) consist of the Fig. No. and the ItemNo. in that order.

We reserve the right to alter the design or any data given in these OperatingInstructions. The illustrations are not binding.

Retain the Operating Instructions for further use.

The Operating Instructions are included with the pump and theconverter. If they have different editions, the version delivered withthe pump describes the pump correctly and the version deliveredwith the converter describes the converter correctly. The versionnumber is either the digit behind the “/” in the GA No. or the firsttwo digits behind the “_”. Example: GA 05.135/4.02 is the forthedition and GA05135_0502 the fifth.

GA05135_0502 - 09/2004 7

Description

1 Description1.1 System overviewThe Leybold MAG pumping system consists of:

The MAG turbo pump

The MAG are turbomolecular pumps utilizing magnetic bearings.Theyare designed to evacuate vacuum chambers down to pressure valuesin the high-vacuum range and to pump high gas throughputs.

The versions without letter behind the number are designed forclean applications only.

The C versions have a coated rotor and are designed for clean or lightcorrosive applications.

The CT versions are additionally equipped with a temperaturemanagement system (TMS) to control the pump temperature. Theyare prepared for use in medium to harsh corrosive applications.

The pumps are available with 2 different rotors:

MAG-version: 11 turbo pump stages

MAG W-version: 6 turbo pump stages and 1 active drag stage.

See table “Pump configuration” for an overview on the available models.

The MAG.DRIVE 2000 frequency converter

The electronic converter converts the single-phase line supply voltageinto a three-phase DC voltage to drive the pump motor. It also evalua-tes measured signals and controls

- the pump functions

- the temperature management system (TMS) and

- the active magnetic bearing system

The MAG.DRIVE 2000 can be operated with the START and STOPkeys, via a plug-in control, or via a network interface.

A cable set consisting of:

- BEARING cable

- DRIVE/TMS cable

MAG ... C ... CT

GA05135_0502 - 09/20048

Description

Fig. 1 MAG W 2000 CT

Each Fuse 4 A

digital

Fig. 2 MAG.DRIVE 2000 Front panel

MAG DRIVE 2000

GA05135_0502 - 09/2004

Materials

Caution

Layers

Caution

9

Description

1.2 Compatibility with pumped media

The MAG are specifically designed for the needs of the semiconductorindustry.

All materials used inside the pump are compatible with typical gases usedfor semiconductor processes.

Please consult Leybold for recommendations on pump models forspecific processes and application requirements.

Corrosion protection

To protect the pump from corrosive gases it is mandatory to use dryNitrogen purge during operation of the pump.The purge gas protects thebearing section and the motor from corrosive gases.

The rotor and the stator of the pump are KEPLA®-coated to prevent corro-sive attack caused by the process gases. The corrosion protection of thepump is effective only when the pump is protected from moisture duringstandstill and storage. If the process gas contains moisture, contactLeybold for recommendations.

Sublimation

Some media (e.g. AlCl3) can sublimate in the pump and form deposits.Thick coatings can infringe on the required operating clearence and ultima-tely cause the pump to seize. These deposits can also react with moistureand generate corrosive gases (e.g. HCl).This can become very critical whenthe pump is exposed to air. Deposits can be avoided in many processes byheating the pump with TMS (Temperature Management System).

The TMS is integrated in all CT-versions. The purpose of the TMS is to keepthe baseflange temperature in a constant range. To achieve the temperatu-re the pump is equipped with a heaterband.

Some media ( e.g. metall organic compounds ) can decompose at the hotsurface of the pump and build layers. Please direct any inqueries to themanufacturer.

In order to handle gases or media (e.g. AlCl3) which can formdeposits inside the pump it is required to use the TMS (Tempera-ture Management System). The temperature selected for suchprocesses has to be set to the maximum value (62°C).

Ignition danger

During operation the pressure inside the MAG is so low that there is no dan-ger of ignition (at pressures below about 100 mbar). A hazardous conditionwill be created if flammable mixtures enter the hot pump at pressuresabove 100 mbar. During operation the pump can reach temperatures ashigh as 120°C (248°F). If the pump is damaged, sparks could occur whichcould ignite explosive mixtures.

Also note the safety information provided by the gas supplier.

Purge gas

GA05135_0502 - 09/200410

Description

1.3 Design of the MAGThe MAG comprises basically the pump housing, the multistage rotor withthe stator package, the drive, and a magnetic bearing.

Rotor

The rotor is made from a high strength aluminium alloy. The rotor and thelower stator plates of the C and CT versions are protected with a specialceramic layer ( KEPLA-COAT® ). The standard rotor is a multi-stage axial-flow turbine. In addition to the turbine stage the wide range rotor has ascrew stage.

Both rotors are machined from one piece and the geometry of the the bla-des is optimized for high compression and pumping speed of the typicalgases used in semiconductor manufacturing processes.

Bearings

The MAG has a built-in precision 5-axis controlled magnetic bearing. Therotor is suspended by trouble-free magnets: along two orthogonal axes in each of two radial planes

and completely in the axial direction

The bearing concept allows for low vibration operations and insures opera-tion of the pump in any mounting position. Magnetic bearings also guaran-tee ultra-clean vacuum because no grease is used for lubrication of bea-rings.

Two touch down bearings are provided to stabilize the rotor mechanically ifimpacts occur during operation. They are only used in case of the breakingof the BEARING cable during operation, strong shocks, or faulty electro-nics.

Motor and control

A DC motor without commutator is used to power the rotor.

Drive voltage for the motor and the operating voltage for the magnetic bea-ring are supplied by the MAG.DRIVE 2000 frequency converter. It alsohandles the automatic monitoring of these systems.

The pump is equipped with a data storage device which stores the impor-tant operating parameters during the complete operation time of the pump.

The converter monitors continously all important operating parameters andprovides warning and alarm signals in case the operating conditionsexceed the specification or the set threshold.

Touch down bearings

Ceramic layer

Magnetic bearing

Data storage

GA05135_0502 - 09/2004 11

Description

Motor

Fig. 3 Section of a MAG

Wide range rotorStandard rotor

Memory chip

GA05135_0502 - 09/200412

Description

1.4 Function and design of theMAG.DRIVE 2000

The MAG.DRIVE 2000 electronic converter is used to drive the MAG2000to MAG 2011 turbomolecular pumps.

The electronic converter converts the single-phase line supply voltage intoa three-phase AC voltage to control and monitor the electronically-com-mutated DC motor. It also evaluates measured signals and controls (open-loop and closed-loop) the pump functions.

The temperature management system (TMS) and the magnetic bearingcontrol system are integrated into the converter. The TMS regulates thepump temperature by switching the heating on/off or cooling the pump.The magnetic bearing control system actively controls the pump rotor in fiveaxes (closed-loop control).

All parameters required for pump operation and the listed faults and ope-rating hours are stored in a non-volatile memory in the pump. When theconverter is switched on, the data are loaded into the converter from thepump.

The outputs of the electronic converter are no-load and short-circuit proof.

For remote control via control connector X14 we recommend that either arelay or optocoupler is used to provide electrical decoupling.

Housing

The converter is supplied with a closed housing. It can be installed in a 19”cabinet; see Section 2.7.

Front panel

Main switch

9-pin connecting socket for the plug-in control or for connection of a serialinterface

2 short-stroke keys

1 green/red STATUS LED

1 green COM LED (communications interface)

1 green MAIN LED (line supply voltage)

2 fuses TMS (Temperature Management System)

The optional plug-in control has 10 keys and 1 LCD with 2 lines, each 16characters. The plug-in control displays operating statuses and failures andallows the configuration of the pumping system.

Rear panel

X14 50-pin D socket connector for remote monitoring and open-loop con-trol

X19 3-pin Hirschmann connector for the connection to the mains supply

X20 55-pin MIL standard socket connector for internal sensors and mag-netic bearing connection

X21 41-pin MIL standard socket connector for the motor, TMS, and purgevalve connection

Spare slot for optional network cards, e.g. Device Net

TMS

DC motor.

Plug-in control

GA05135_0502 - 09/2004 13

Description

X19

X14X20

X21

Each Fuse 4 A

digital

Start Stop

Esc Mon Prog Enter

+_

Each Fuse 4 A

digital

Fig. 4 Front panel

X14 Connection control plug

X19 Mains connection

X20 Connection magnetic bearing

X21 Connection pump motor and TMS

X22 Connection network (optional)

MAG.DRIVE 2000

MAG.DRIVE 2000 with Plug-in control

(X22)

Fig.5 Rear panel with connections

MAG DRIVE 2000

MAG DRIVE 2000

GA05135_0502 - 09/200414

Description

1.5 Standard specification

MAG

The turbomolecular pumps are shipped complete, sealed in a PE bag con-taining a desiccant.

The maximum effective life time of the desiccant is one year.

The intake flange is sealed with a transport seal, the forevacuum flange witha plastic cap.

For the intake flange, a centering ring with FPM O-ring, outer ring, and asplinter guard are enclosed.

We also provide the bolts for attaching the pump to your tool. To avoid anysafety risk we highly recommend using only the bolts provided with thepump. Refer also to Section 2.3 “Connecting the MAG ...”.

The electronic frequency converter MAG.DRIVE 2000 and the cables requi-red for operation must be ordered seperately.

In addition, for all pumps except from the MAG 2000 with CF flange a sealkit is included to seal the pump tightly if it is removed from the process.

MAG.DRIVE 2000 Converter

Line supply cable with USA connector, approx. 3m

Line supply cable with EURO connector, approx. 3 m

2 spare fuses for the TMS (miniature fuses 5 x 20 mm, F4A; accordingto IEC 127-2/1) and 2 fuse holders 6.3 x 30 mm

Connector for control plug X14 (pins 47/48 bridged)

Cable Set BEARING cable

DRIVE/TMS cable

GA05135_0502 - 09/2004 15

Description

1.6 Technical data

MAG 2000 C/CT W 2000 C/CT W 2010 CHT

High-vacuum connection flange DN 250 ISO-F 250 ISO-F 250 ISO-F

Pumping speed for N2 measured with splinter guard (PNEUROP) l·s-1 1550 1650 1650

Gas flow (continuous operation with Argon) sccm 1300 1300 1300

Compression for N2 >108 >108 >108

Ultimate pressure as to DIN 28 400 mbar < 10-8 < 10-8 < 10-8

Max. forevacuum pressurewith Nitrogen mbar 1.6 3.5 3.5with Argon mbar 1.6 4.3 4.3

Rotor Speed min-1 28,800

Run-up time min < 8 < 8 < 8

Braking time with/without venting min 1 / < 7.5

Cooling waterCooling connectionSwagelok elbow for tube OD mm 6.4 (1/4“) 6.4 (1/4“) –Swagelock tube – – 1/4“Cooling water temperature °C 15 – 30 15 – 30 10 – 30

°F 59 – 86 59 – 86 50 – 86Inlet pressure bar 2 – 7 2 – 7 2 – 6

Base flange temperature C version °C 30 – 50 30 – 50 –(depending on the load) °F 86 – 122 86 – 122 –

Base flange temperature CT version °C 30 – 62 30 – 62 30 – 62(controlled) °F 86 – 144 86 – 144 86 – 144

Weight, approx. kg 68 62 65

Max. temperature of the high-vacuum flangeshort-time °C 85

°F 185in continuous operation °C 60

°F 140

Forevacuum connection flange DN 40 KF

Recommended backing pumpDry compressing pump with pumping speed m3/h 100 50 50or rotary vane pump TRIVAC D 65 BCS

Admissible ambient temperature °C 5 – 40°F 40 – 104

Storage temperature °C -10 – +60°F 14 – 140

Max. relative air humidity 95% (non-condensing)

Degree of protection (EN 60529) IP 20

GA05135_0502 - 09/200416

Description

Technical data (continued)

MAG W 2010 C W 2011 C 2000

High-vacuum connection flange DN 250 ISO-F 250 ISO-F 250 CF

Pumping speed for N2 measured with splinter guard (PNEUROP) l·s-1 1650 1650 1650

Gas flow (continuous operation with Argon) sccm 1000 1000 –

Compression for N2 >108 >108 >108

for H2 – – 7.5 · 104

Ultimate pressure as to DIN 28 400 mbar < 10-8 < 10-8 < 2 · 10-10

Max. forevacuum pressurewith Nitrogen mbar 3.3 3.3 1with Argon mbar 4.1 4.1 –

Max. forevacuum pressure mbar – – < 10-2

Rotor Speed min-1 28,800

Run-up time min < 10 < 10 < 8

Braking time with/without venting min 1 / < 7.5

Cooling waterCooling connectionHose nipples (inlet) 2 x 3/8“ – –Hose nipples (outlet) 1 x 1/2“ – –Rohr-Anschluss (inlet) – 3/8“ –Rohr-Anschluss (outlet) – 1/2“ –Hose nipples for hose with ID mm – – 8 – 10Cooling water temperature °C 15 – 30

°F 59 – 86Inlet pressure bar < 10 < 10 2 – 7

Base flange temperature C version °C 30 – 50 30 – 50 –(depending on the load) °C 86 – 122 86 – 122 –

Weight, approx. kg 65 65 72

Max. temperature of the high-vacuum flangeshort-time °C 85

°F 185in continuous operation °C 60

°F 140bake-out °C – – 120

°F – – 248

Forevacuum connection flange DN 40 KF

Recommended backing pumpDry compressing pump with pumping speed m3/h 50oder rotary vane pump TRIVAC D 65 BCS

Admissible ambient temperature °C 5 – 40°F 40 – 104

Storage temperature °C -10 – +60°F 14 – 140

Max. relative air humidity 95% (non-condensing)

Degree of protection (EN 60529) IP 20

GA05135_0502 - 09/2004

Technical data (continued)

Purge gas

See Section 2.6

MAG.DRIVE 2000

Voltage range 200 - 240 V +10% -15%Line supply frequency 50 / 60 Hz

LoadStand-by approx. 100 WContinuous (rated speed) 810 WMaximum 1800 W

Max. voltage motor 60 VMaximum pump current 20 A rms

Internal main fuse 16 ARated braking capacity 200 kA

System fuse L or G characteristic

Maximum frequency 480 Hz

Load capability, relay output 42 V, 1 A

Temperature during operation 0-45 °CStorage temperature - 10 °C to + 60 °C

Relative air humidity 95% (non condensing)

Overvoltage category IIContamination level in accordance with EN 61010 2

Weight 10 kg

Degree of protection (EN 60529) IP20

17

Description

GA05135_0502 - 09/200418

Description

1.7 Ordering dataPart No.

Pumps see Table “pumps”

Seal Kit DN 250 metal 200 07 901

Seal Kit metal for other flanges on request

MAG.DRIVE 2000 converter 400034V0011

Plug-in control 121 36

Connecting cables, converter — pump see Fig. 7

19“ installation frame 161 00

Blind plate 1/4 19“ 3 HE 161 02

Screws M 10 x 50 200 15 752Screw quality 12.9 according to EN ISO 898-1 with coating0,2 % yield strength > 1080 N/mm2

Washers 200 07 833

Nuts 211 28 117

1500

1000

500

0

2000

10 -2 10 -1 1Torr

10 -310 -4

l/s MAG 2000 ...MAG W 2000 ...

Fig. 6 Pumping speed curves for Nitrogen

High Vacuum Pressure

Pum

ping

spe

ed

Rotor speed 480 HzPurge gas flow 36 sccm Nitrogenwith splinter guardForepump

for MAG 2000 CT D 65 B + WS 501for MAG W 2000 CT D 65 B + WS 251

Pipe 1 m DN 40according to PNEUROP

GA05135_0502 - 09/2004 19

DescriptionP

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Inle

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Pur

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Tem

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Pur

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GA05135_0502 - 09/200420

Description

Fig. 7 Overview and ordering data for connecting cables

0°

270°90°

40°

180°

BEARINGconnection

DRIVE/TMSconnection

Length Cable Cable outlet Cable outlet Order No.Converter Pump

1.5 m BEARING bended 40° bended 140° 121 291.5 m DRIVE/TMS bended 40° bended 225° (DRIVE) 121 30

bended 185° (TMS)

5 m BEARING bended 225° straight 121 195 m DRIVE/TMS bended 180° straight 121 20

10 m BEARING bended 225° straight 121 2110 m DRIVE/TMS bended 180° straight 121 22

20 m BEARING bended 225° straight 121 2520 m DRIVE/TMS bended 180° straight 121 26

0°

DRIVEconnection

BEARINGconnection

TMSconnection

180°

225°

GA05135_0502 - 09/2004 21

Description

455

113

196

128135

27max. 115

122.4

198Ø 3.3

Each Fuse 4 A

Fig. 9 Standard fixing of the MAG.DRIVE 2000

START

STOP

Com

Status

Main

X7

FusesTMS

MAG.DRIVE

Each Fuse 4 A

19“-Einbaurahmen

4 Schrauben M3

gerade Stecker

abgewinkelteStecker

Fig. 8 Dimensional drawing of the MAG.DRIVE 2000; dimensions in mm

GA05135_0502 - 09/200422

Description

Fig. 10 MAG 2000 C, dimensions in mm

Ø 339

Ø 335DN 250 ISO-F

Ø 199

272

384

330

DN 40

192

30°

39°

35°

18°

36°

102

115

202

210

30° 12x30°

310

11

MAG 2000 C Part No. 400045V0009Part No. 894 16 similar

Boreholes M8,15 mm deep

GA05135_0502 - 09/2004 23

Description

DN

40

318

202

358

16

303

386

272

ø335

ø199

ø335

ø261

12x30° = 360°

DN 250 ISO F

18°18°

51°

35°

102

11530°

310 11

30°

Fig. 11 MAG W 2000 C, dimensions in mm

MAG W 2000 C Part No. 894 17

Boreholes M8,15 mm deep

GA05135_0502 - 09/200424

Description

DN 250 ISO F

DN

40

202

272

303

318

358

386

ø339

ø199

ø261

ø335

16

12x30° = 360°

421

30°

310 1

18°18°

51°

30°

35°

102

192

115

Fig. 12 MAG 2000 CT, dimensions in mm

MAG 2000 CT Part No. 894 30

Boreholes M8,15 mm deep

GA05135_0502 - 09/2004 25

Description

DN 250 ISO F

DN

40 35

8318

1630

3

386

202

272

ø335

ø261

ø355

ø199

12x30° = 360°

18°18°

51°

30°

35°

421

102

30°

310 11

115

Fig. 13 MAG W 2000 CT, dimensions in mm

MAG W 2000 CT Part No. 894 31

Boreholes M8,15 mm deep

GA05135_0502 - 09/200426

Description

Fig. 14 MAG W 2010 CHT, dimensions in mm

DN

40

DN 250 ISO F

272

386

303

16

ø355

ø335

ø261

400

ø199

320.

5

ø284

201

ø310

336

12x60 (=360 )

°

11

ø310

30°

°

18°51°

18°

10

30°

35°

421

102

115

MAG W 2010 CHTPart No. 121 31

Boreholes M8,15 mm deep

GA05135_0502 - 09/2004 27

Description

Fig. 15 MAG W 2010 C, dimensions in mm

MAG W 2010 C Part No. 121 32

Boreholes M8,15 mm deep

GA05135_0502 - 09/200428

Description

35

387

272

41 39

309

Ø 335

Ø 335

DN 250 ISO-F

DN 40

26,4

°

23,6°

36°

42°

21°

159,5

115

115

25°

188189

15°

30°12x 30°

11

Ø 310

MAG W 2011 C Part No. 400045V0005Part No. 400045V0007 similar

Fig. 16 MAG W 2011 C, dimensions in mm

56

201

GA05135_0502 - 09/2004 29

Description

Fig. 17 MAG 2000, dimensions in mm

MAG 2000 Part No. 400045V0008

GA05135_0502 - 09/200430

Installation

Fig. 18 Connection elements for the MAG (W) 2000 C, CT; MAG W 2010 CHT similar

2 Installation

Intake flange

Forevacuum flange

Cooling water out

Cooling water in

Purge gas in

TMSconnection

BEARINGconnection

DRIVE connection

Purge gasvalve

GA05135_0502 - 09/2004 31

Installation

Fig. 19 Connection elements for the MAG W 2011 C and MAG 2000

Intake flange

Forevacuum flange

Cooling water out

Cooling water in

Purge gas in

Cooling water connectionsinlet and outlet interchangeable

Intake flange

Forevacuum flange

BEARINGconnection

DRIVEconnection

2.1 Unpacking - storing - transpor-tation

Remove the equipment from the transportation box and keep the packa-ging. Make sure that the product has not been damaged during transpor-tation. If this unit is damaged contact your carrier and inform Leybold ifnecessary. For storage of the product, use the packaging provided.

Lift the pump by the crane eyelets.

You can position the pump on the base plate for transport with a lift-truck.Protect the pump against slipping and tipping over.

Be careful not to damage the sockets and coolant connectionsduring transportation.

Do not stand below the pump while connecting or removing theMAG.

The MAG is shipped in a sealed PE bag with desiccant. Do not open thesealed package until immediately before installing.

Do not remove the covers and blanking flanges until you are ready to makethe connections, to ensure that the MAG is installed under the cleanestpossible conditions.

2.2 Operating environmentWhen using the MAG inside a magnetic field, the magnetic induction at thepump housing must not exceed 5 mT; (1 mT (milliTesla) = 10 G (Gauß))

Exceeding this limit can cause excessive rotor heating due to the eddy cur-rents generated in this situation. It is therefore necessary to provide suita-ble shielding in such cases.

The standard version of the MAG is resistant to radiation at levels up to 103

Gy. (1 Gy (Gray) = 100 rad)

The ambient temperature must not exceed 40 °C (104 °F).

The noise level when the pump is running is below 70 dB(A) (EN ISO 2151).No acoustic insulation is required.

GA05135_0502 - 09/200432

Installation

Caution

Warning

Keep the packaging

Radiation

Magnetic field

GA05135_0502 - 09/2004 33

Installation

Splinter guard

2.3 Connecting the MAG to thevacuum chamber

The MAG is shipped in a sealed PE bag with desiccant. Do not open thepackage until immediately before installing.

Do not remove the covers and blanking flanges until you are ready to makethe connections, to ensure that the MAG is installed under the cleanestpossible conditions.

Pay attention to maximum cleanliness when connecting.

Remove the transport seal from the intake flange. To do so unscrew thescrews (20/2) and remove the aluminum cover. We recommend saving thetransport seal for maintenance.

Foreign objects entering the pump through the high-vacuum flange cancause serious damage to the rotor. That’s why the splinter guard mustalways be installed.

Damages caused during operation without the splinter guard are excludedfrom warranty.

The pump must be securely attached. If the pump should sud-denly seize, inadequate attachment could cause the pump tobreak away or allow internal pump parts to be discharged. Neveroperate the pump (in bench tests, for instance) without its beingconnected at the vacuum chamber.

If the pump should suddenly seize, a high decceleration torque willhave to be absorbed by the system. To accomplish this, use allbolts provided by Leybold for fastening the high-vacuum flange;see also the Fig. 21 and 22.

1

2

1 Aluminum cover2 Screws

Fig. 20 Removing the transport seal

Warning

GA05135_0502 - 09/200434

Installation

Fig. 22 ISO-F flange connection with bolts and nuts

DN 200/250 ISO-F: 12 bolts M 10 x 50

Installation torque per bolt 35 +5 Nm

Bolt quality 12.9 according to

EN ISO 898-1 with coating

0,2% yield strength > 1080 N/mm2

Nut

ISO-F flange

Vacuum sealing disk consistingof centering ring and O-ring

with outer support ring

ISO-F flange

Bolt

Fig. 21 Fixing the intake flange

48 mm

40 mm

2 mm

10 mm

DN 250 CF: 32 bolts M8 x 40

Installation torque per bolt 25+5 Nm

Bolt quality:10.9 according to

EN ISO 898-1 with coating

0,2% yield strength > 900 N/mm2

310 mm

261 mm

14 mm

35 mm

DN 250 ISO-F:

12 bolts M10 x 35

Installation torque per bolt: 35+5 Nm

Bolt quality:12.9 according to EN ISO 898-1 with coating

0,2% yield strength > 1080 N/mm2

Fig. 23 Installing the splinter guard

Correct

Wrong

CautionInstall the splinter guard as shown. Installingthe splinter guard upside down may lead tocontact between splinter guard and rotorduring fast venting of the pump.

GA05135_0502 - 09/2004 35

Installation

Mount the MAG as close as possible to the vacuum chamber. If the MAGis permanently flanged to a vacuum chamber with a weight exceeding 500kg, it will not be necessary to secure it in any other way.

The vacuum chamber must be securely attached to the floor or a solid wall.

In case of lighter vacuum vessels secure the pump additionally. The pum-p’s bottom is equipped with tappered holes for fastening a support; seedimensional drawings.

For earthquake protection fix the pump as shown in Fig. 21 and 24.Depending on the chamber’s weight and fixing use the boreholes in thepump’s bottom in addition. The standard fixing for the converter is shownin Fig. 9.If several turbomolecular pumps are installed to the vacuum chamber of thesame system, there is the risk of interference (vibration interference bet-ween the pumps). If such a risk exists please contact Leybold VacuumApplication Support.

We recommend installing an isolation valve between the pump and thechamber. The valve should be closed during wet cleans of the chamber andin case of pump failures which will lead to a pump shut down. The valveshould normally be closed with power off.

The basic flange heater can become so hot during operation (> 85°C, > 185 °F) that it represents a burn hazard:

Provide protection against contact with the hot components.

Correct

Wrong

Fig. 24 Vacuum chamber fixed to the floor

Warning

Earthquake protection

Isolation valve

Vibration influence

GA05135_0502 - 09/200436

Installation

2.4 Connecting the backing pumpA two stage rotary vane pump or dry-compression backing pump is requi-red to support operation of the MAG.

In case of high gas throughput, it may also be necessary to use a roots blo-wer to achieve the backing pressure necessary for operating the MAG.

Fig. 25 shows schematically the design of a pump system incorporating aMAG with an additional foreline valve and an isolation valve between cham-ber and MAG.

The foreline isolation valve is recommended to protect the MAG from shockventing in case of uncontrolled shut down of the backing pump. This valvemust be able to close fast enough to avoid pressure increase in the MAG.

In case of an oil-sealed backing pump the foreline isolation valve protectsthe MAG from backstreaming oil vapor during standstill.

Connect the forevacuum flange of the MAG to the backing pump.

The torque on the forevacuum connection flange must not exceed thevalues shown in Fig. 26.

Fig. 25 Layout of a turbomolecular pump system

1 Turbomolecular pump2 Forevacuum gauge point3 Backing pump4 Anti-vibration bellows5 Forevacuum valve6 High vacuum valve7 Purge gas connection8 Valve in the roughing line9 Electronic frequency converter

— — — — roughing line; recommendedif shorter cycle times are to be achieved

— · — · — · — · DRIVE/BEARING and TMS cable

Foreline valve

GA05135_0502 - 09/2004 37

Installation

Warning

M < 150 NmMq < 150 Nm

Fig. 26 Maximum torques for the forevacuum connection

The forevacuum line must be tight. Hazardous gases can escapeat leaks or the gases being pumped can react with the air or humi-dity. We recommend a leak check.

M

Mq

GA05135_0502 - 09/200438

Installation

2.5 Connecting the cooling water

Cooling water specifications

Cooling water requirement See Fig. 27 to 30

Appearance Colorless, clear, free of oils and greases

Sediments < 250 mg/l

Particle size < 150 µm

Electrical conductivity < 500 µS/cm

pH value 7 to 8.5

Overall hardness (total alkaline earths) max. 20 ° German hardness scale

(= 3.57 mmol/l)Further information on request.

Connect the cooling water to the connectors; see Fig. 27 to 31.

Turn off the cooling water supply when the pump is switched off in order toavoid condensate formation in the pump.

If you do not close the cooling water it may take longer to achieve ultimatepressure after start up of the system.

Cooling water is only reqired when baking out the pump. No coolingwater is reqired when operating the pump at ultimate pressure.

GA05135_0502 - 09/2004 39

Installation

Cooling water out1/4“ tube

Cooling water in1/4“ tube

5 10 15 20 25 30 35 40°C

220

200

180

160

140

120

100

80

60

40

l/h

Fig. 27 Cooling water connection and requirement for the MAG (W) 2000 C, CT

Cooling water temperature

Coo

ling

wat

erflo

w

maximum

optimum

minimum

GA05135_0502 - 09/200440

Installation

Fig. 28 Cooling water connection and requirement for the MAG W 2010 CHT

Kühlwasser-Auslass

Kühlwasser-Einlass

IN OUT

Cooling valve

MAG cooling circuit

5 10 15 20 25 30 35 40°C

300

250

200

150

120

100

50

0

l/h

Operation window

Flow

Temperature

0 1 2 3 4 5 6bar overatmosphere

300

250

200

150

120

100

50

0

l/h

Pressure

Flow

An internal bypass in the cooling water distri-butor allows operating the MAG in series withother cooling water consumers.

Operationsfenster

GA05135_0502 - 09/2004 41

Installation

Fig. 29 Cooling water connection and requirement for the MAG W 2010 C

Cooling water out1/2“ hose

Cooling water in2 x 3/8“ hose

5 10 15 20 25 30 35 40°C

400

360

320

240

200

160

120

80

40

0

l/h

minimum

Temperature

Flow

GA05135_0502 - 09/200442

Installation

Fig. 30 Cooling water connection and requirement for the MAG W 2011 C

Cooling water outSwagelock

tube connector 1/2“

Cooling water inSwagelock

tube connector 3/8“

5 10 15 20 25 30 35 40°C

400

360

320

240

200

160

120

80

40

0

l/h

minimum

Temperature

Flow

Cooling water connectionsinlet and outlet interchangeable

Fig. 31 Cooling water connection for the MAG 2000

GA05135_0502 - 09/2004 43

Installation

2.6 Connecting the purge gasPlease contact Leybold for assistance in making the decision as to whichmedia can be pumped with or without purge gas.

In processes which require purge gas the pump will have to be vented,when it is switched off, through the purge gas port.

Suited are all gases,

which will not cause corrosion or pitting in aluminium and steel and

which in connection with process deposits in the pump will not causecorrosion or sticking.

For venting and as the purge gas we recommend inert gases like nitrogenor argon. The temperature of these gases should be between 5 °C and 80°C , max. relative humidity should not exceed 10 ppm.

In individual cases and after consultation also dry, filtered, oil-free air or fil-tered ambient air may be used (filter mesh < 1µm). In this case connect afilter to the purge gas and venting valve.

Change the filters after some time, at least annually.

Different venting methods are described in Section 3.1.

Monitor the purge gas supply continuously.

Insufficient purge gas flow can result in:

Process gases entering the motor and bearing area of theMAG

Process gases escaping from the purge gas inlet

Humidity entering the pump.

Inadequate purge gas flow voids the warranty.

Warning

GA05135_0502 - 09/200444

Installation

Pumps with purge gas valve(MAG (W) 2000 C, CT, Part No. 894 16/17/30/31)

The MAG is equipped with a purge gas and venting valve. It is controlledby the MAG.DRIVE.

Connect the purge gas and venting valve to the purge gas supply via apressure reducer.

Connection: VCR Nut 1/4“

Purge gas connection pressure, abs. 1.2 - 2.0 bar

Purge gas throughputat purge gas pressure 1.5 bar abs. 0.6 mbar·l·s-1

36 sccm

With no voltage applied the purge gas and venting valve is closed.

The purge gas valve will be open when switching on the MAG.DRIVE. Thered LED at the purge gas valve lights.

The venting valve can be opened via the control plug X14. The red LED atthe venting valve lights when the valve is open. A blind-flanged pump willbe vented within 1 minute via the open venting valve.

24 V 24 V 24 V

VCR Nut 1/4“

Port connector:Tube to VCR

Male connector: Tube OD 1/4“ -ISO male pipe size: 1/4“

SealLED purge valve

LED vent valve

GA05135_0502 - 09/2004 45

Installation

Connection to Nozzle Connection topurge gas supply pump

Purge valve venting valve

Fig. 32 Schematic drawing of purge and venting valve and purge gas connection with connection kitfor the MAG (W) 2000 C, CT

Status Purge/Vent ValveNo Purge: Purge closed Purge Purge open Vent Purge open

Vent closed Vent closed Vent open

Pumps mit with purge gas valve(MAG W 2011 C, Part No. 400045V0007)

The MAG is equipped with a purge gas and venting valve. It is controlledby the MAG.DRIVE. Refer to Figure 33 for details on the design and function of the purge gasand vent valve assembly.

Attach the purge gas hose to the nipple and secure with a hose clamp.

Set purge gas pressure for a value of 1.5 to 6.0 bar, absolute.

Use in the purge gas supply system only valves which can handle both thelow purge gas flow and the much greater venting gas flow.

Purge gas inlet pressure exceeding 10 bar can dama-ge or destroy the purge gas and vent valve.

With no voltage applied the purge gas and vent valve is closed.

The purge gas and vent valve will be open when switching on theMAG.DRIVE. The red LED at the purge gas valve lights.

Technical data

Purge gas pressure, absolute 1.5 to 6.0 bar

Purge gas flow 36 sccm ± 5 sccm(36 sccm = 0.6 mbar·l/s)

Vent gas flow 4800±10% sccm

Leak rate < 10-7 mbar·l/s

Connection: VCR Nut 1/4“

GA05135_0502 - 09/200446

Installation

Caution

GA05135_0502 - 09/2004 47

Installation

lower magneticbearing

Motor

upper magneticbearing

Sensor PVW 2,4

lower magneticbearing

24 V

Turbomolecular pump

Pump purge gas inlet

Vent valve: shown closed;

opens a bypass around the choke

when the pump is to be vented

Choke (capillary)

Purge gas valve: shown open

Sintered metal filter

Pressure regulator

Purge gas, e.g. N2 , Ar or dry air

Forevacuum port

LEDs light when

the valve is open

Fig. 33 Purge gas and vent valve assembly for the MAG W 2011 (schematic) and purge gas connection

GA05135_0502 - 09/200448

Installation

Pumps without purge gas valve(MAG W 2010 CHT, W 2010 C, W 2011 C)

The MAG is equipped with a purge gas connector. To ensure protection ofthe pump a constant purge gas throughput of 36 sccm ± 5 sccm is requi-red. You may use a flow controller to ensure the flow.

Connect purge gas as shown in Fig. 34 to 36.

Pumps with manually actuated venting valve(MAG 2000 C, Part No. 400045V0009)

The MAG is equipped with a manually actuated venting valve.

Connect the venting valve to the purge gas supply via a pressure reducer.You may use a flow controller to ensure the flow.

Connection DN 16 KF

Purge gas connection pressure, abs. 1.5 bar

Purge gas throughputat purge gas pressure 1,5 bar 0.6 mbar·l·s-1

36 sccm

Fig. 34 Purge gas connection with connection kit for the MAG W 2010 CHT

VCR Nut 1/4“

Port connector:Tube to VCR

Male connector: Tube OD 1/4“ -ISO male pipe size: 1/4“

GA05135_0502 - 09/2004 49

Installation

Fig. 35 Purge gas connection MAG W 2010 C

Fig. 36 Purge gas connection MAG W 2011 C, Part No. 400045V0005

Purge gas connection with capillaryfor flow reduction to 36 sccm at 1.5 bar abs.

Fig. 37 Purge gas connection for the MAG 2000 C, Part No. 400045V0009

GA05135_0502 - 09/200450

Installation

2.7 Installing the MAG.DRIVE 2000The converter can be installed in a 19” cabinet. It is 1/2 of 19“ wide and has3 height units. For easier installation we offer an installation frame; seeSection 1.7. If you use this installation frame, remove the converter’s rub-ber feet when installing the converter.

In order to guarantee sufficient cooling, there must be a minimumclearance of 1 height unit (44.2 mm) at the bottom and 1 heightunit at the top. During operation the temperature of the ambientair must not exceed 45 °C.

The pump may be operated only with a suitable frequency con-verter and a suitable connector cable.

Peak voltages of up to 130 V may be present at the connector linebetween the frequency converter and the pump; mains voltage ispresent at the heater.

Route all cables so as to protect them from damage.

The protection rating for the connectors is IP 30.

Do not expose the pump, the frequency converter or the connections todripping water.

Install 16 A fuses for the converter.

When connecting the frequency converter to a polyphase network betweentwo phases, provide additional external fuse protection for both phases(fuse amperage: 16 A). The external fuse must have a minimum rated bra-king capacity of 5 kA.

Only adequately trained electrical/electronic personnel may con-nect-up the equipment in accordance with valid IEC (international),EN (European) and/or national guidelines, or under their manage-ment and supervision.

The connecting cables between the converter and pump mayonly be inserted or removed when the pump is switched off andstands still after the run-down procedure and the converter is iso-lated from the line supply.

To avoid contact with hazardous voltages, the safety sleeves mustbe mounted properly on

the DRIVE/TMS connector at the converter (see Fig. 38) and

the TMS connector on the pump.

Do not switch on frequency converter until all cables have beenconnected properly.

Caution

Warning

Warning

GA05135_0502 - 09/2004 51

Installation

Unauthorized opening of the converter voids the warranty.

Hazardous voltages are present inside the converter. Death orsevere injury can occur if you come into contact with these hazar-dous voltages. Before opening the converter, isolate the converterfrom the line supply, and lock the switch so that it cannot be acci-dentally switched on again.

In addition the pump has to stand still because it works as gene-rator as long as it rotates, and the pump cables have to bedisconnected.

Installation instructions to maintain EMC

The MAG.DRIVE 2000 complies with the Electromagnetic Compatibility(EMC) Directives of the EC. In order to maintain this the following installa-tion instructions must be observed:

To connect the pump to the converter the prescribed Leybold cablesmust be used.

The connection cables to the analog interface (control plug X14) and tothe serial interface (connector X7) must be shielded. The shields mustbe connected to the metal housings of the SUB-D-connector and SUB-D-socket.

Warning

Fig. 38 Mounting the safety sleeves; rear side of the converter shown.

Mount the safety sleeve onto the pump’s TMS connection too.

1. 2.

GA05135_0502 - 09/200452

Installation

2.7.1 Power supply connection X19

The converter is ready to be connected to line supply voltages between200-240 V 50/60 Hz. The connection is established using the power cablesupplied, which is inserted at connector X19 at the rear of the converter.

The converter will be damaged if it is operated with the incorrectsupply voltage.

2.7.2 Pump connection

To avoid contact with hazardous voltages in case of malfunctionthe pump must be connected to PE, see Fig. 41.

Connect the converter (X20) to the magnetic bearing connection of thepump (X23) using the BEARING cable.

Connect the converter (X21) to the pump motor connection (X25) and tothe TMS connection (X30) using the combined DRIVE/TMS cable.

Also refer to Fig. 40.

Make sure that you have fixed all cables properly. Push the safety sleevesonto the the DRIVE/TMS connector at the converter and the TMS connec-tor on the pump and tighten the screws.

1 2 3s

1 = Phase L2 = Not assigned3 = Neutral N

Fig. 39 Connector assignment X19, supply connection

Caution

Warning

GA05135_0502 - 09/2004 53

Installation

X19

X14X20

X21

Fig. 40 Block wiring diagram

X25 X23 X30

MAINS

Control plug

TMS(Not used forMAG W 2010 C andMAG W 2011 C)

BEARING

DRIVE

Borehole M8, 15 mm deep

for PE connection

Fig. 41 PE connection for the pump

GA05135_0502 - 09/200454

Installation

2.7.3 Control plug X14

Emergency off

Make sure that pins 47 and 48 are connected via a jumper if you don’t con-nect an emergency off switch.

A plug for the control plug X14 with a jumper connected between pins 47and 48 is included in the standard specification.

Description of the Emergency Off connection

Pins 47 and 48 of control plug X14 make it possible to disable the outputstage of the frequency converter via the hardware. The power flow to themotor is then interrupted.

The two pins must be connected to each other to ensure proper operation.

If the two pins are to be monitored by the system control, a floating (dry)contact must be available on the system side; load carrying capacity: 42VDC, 100 mA.

The contact used and the connecting cable must be protected against linesupply voltage through double or reinforced insulation such that no hazar-dous contact line supply voltage can be applied to pins 47 and 48 in theevent of a fault.

Relay outputs

The MAG.DRIVE 2000 converter has 9 relay outputs. They have changeo-ver contact. Five relay outputs are permanently assigned a signal.

Failure

Normal operation

Warning

Acceleration

Deceleration

The option relays can output one of the following signals:

Threshold bearing temperature reached

Threshold motor current reached

Threshold frequency reached

No cooling water

No purge gas

TMS temperature OK

Vent

Start command applied

Power supply O.K.

Pump standstill

Option relay 6 can store the selected signal. The option relays 7, 8, and 9cannot store the selected signal permanently and change to the default set-ting after a power interruption. We recommend using only the default set-tings for the option relays 7, 8, and 9.

GA05135_0502 - 09/2004 55

Installation

Fig. 42 Assignment control plug X14

X14 50 pole Sub-D I/OPIN SIGNAL1 Relay 1 n.o. FAILURE2 Relay 2 n.o. NORMAL

OPERATION3 Relay 3 n.o. WARNING4 Relay 4 n.o. ACCELERATION5 Relay 5 n.o. DECELERATION6 Relay 6 n.o. OPTION7 Relay 7 n.o. OPTION8 Relay 8 n.o. OPTION9 Relay 9 n.o. OPTION10 GND11 Dig. input REMOTE/LOCAL12 Dig. input START/STOP13 Dig. input TMS OFF14 Dig. input PURGE GAS OFF1516 Analog input 117 Analog input 2

18 Relay 1 com. FAILURE19 Relay 2 com. NORMAL

OPERATION20 Relay 3 com. WARNING21 Relay 4 com. ACCELERA-TION22 Relay 5 com. DECELERA-TION23 Relay 6 com. OPTION24 Relay 7 com. OPTION25 Relay 8 com. OPTION26 Relay 9 com. OPTION27 GND28 +15V29 +15V30 GND31 GND32 Analog_GND33 Analog_GND

34 Relay 1 n.c. FAILURE35 Relay 2 n.c. NORMAL

OPERATION36 Relay 3 n.c. WARNING37 Relay 4 n.c. ACCELERATION38 Relay 5 n.c. DECELERATION39 Relay 6 n.c. OPTION40 Relay 7 n.c. OPTION41 Relay 8 n.c. OPTION42 Relay 9 n.c. OPTION43 GND44 Dig. input VENTING ON45 Dig. input Reserve46 Dig. input Reserve47 Dig. input EMERGENCY OFF48 Dig. input EMERGENCY OFF4950 Analog output

n.o. = normally open com. = commonn.c. = normally closed

Fig. 43 Control plug X14: Emergency off

EMERGENCY OFF X14.47

EMERGENCY OFF X14.48

EMERGENCY OFF active

Option relay 7 Start command applied

Option relay 8 Power supply O.K.

Option relay 9 Pump standstill

The selection of signals for the option relay and the adjustment of theirthresholds can be achieved via the operator control menu; see Section3.9.2.

Analog output

The converter has an analog output which provides an analog signal (0..10V) with a 10-bit resolution. The analog output function can be alternativelyused to output

motor current

actual frequency

motor temperature

rotor displacement signals (PW24, PV13, PZ12)

The output value can be increased or reduced by a scale factor; seeSection 3.9.2 Settings Converter.

GA05135_0502 - 09/200456

Installation

Analog inputs

The converter has two analog inputs with a 10-bit resolution.

Input signal: 0...10V

A supplementary function can be set for analog input 2 via the operatorcontrol menu; see Section 3.9.2:

No function: The input signal can be output via the serial interface.

Frequency setpoint: In addition to the function described above, the drivefrequency setpoint is entered via analog input 2.

Digital inputs

The converter has 5 digital inputs with the following functions:

TMS OFF

Purge gas OFF

Vent ON

The functions are active if a High signal (15 V; e.g. Pins 28 or 29) is con-nected at the digital input.

Remote

Start (if Remote is active)

The functions Start and Remote are active if a Low signal (GND; e.g. Pins27 or 43) is connected at the digital input.

2.7.4 Interface connector

A 9-pin sub-D socket is provided at the front panel. The connector X7 isassigned the serial interface RS 232. It is only to be used by the LeyboldService.

15

69

1 +5V Power supply for plug-in control2 TXD3 RXD4 n.c.5 GND6 -5V Power supply for plug-in control7 Reset out for plug-in control8 select plug-in control input9 Boot input

Fig. 44 Connector assignment, interface X7 (front side)

GA05135_0502 - 09/2004 57

Installation

X14.17

0

1 Analog input 2

Relay 4 AccelerationAcceleration X14.21

X14.4

X14.37

Relay 5 DecelerationDeceleration X14.22

X14.5

X14.38

Functionanalog input 2

Analog input 2Frequency

setpoint

X14.16

Analog input 1

Analog input 1

X14.32/33Analog ground

X14.35

&X14.19

X14.2Actual frequency

Normal operation

Start commandapplied Relay 2 Normal Operation

WarningX14.20

X14.3

X14.36

Relay 3 Warning

X14.18

X14.1

X14.34

No failure

Relay 1 Failure

Fig. 45 Function diagram outputs, Part 1 & inputs

GA05135_0502 - 09/200458

Installation

Fig. 46 Function diagram outputs, Part 2

0

X14.23/24/25/26

X14.6/7/8/9

X14.39/40/41/42

X X14.50

X14.32/33

X14.28/29+15 V

8

Venting

Threshold

0

1

2

4

5

6

Rotor displacementPVW13peakPVW24peak

PZ12peak

Current limiting80 mA

1

2

3

4

5

6

7

9

Pump standstillStart command

Power supply o.k.

Threshold

Threshold

Motor- or bearing-temperature

Motor current

Act. frequency

Functionsignal relay

Functionanalog output

Analog output

Analog ground

Scale

No cooling water

No purge gas

TMS temp. o.k.

Relay 6/7/8/9 Option

GA05135_0502 - 09/2004 59

Operation

3 Operation3.1 General operation rulesThe magnetic bearing in the MAG are immune to wear. In addition to themagnetic bearings, the MAG is equipped with touch-down bearings whichprotect the rotor against mechanical contact with the stator if the pump issubjected to external shock loading or when the pump is switched off.These touch-down bearings have a limited service life. Please observe thefollowing in order to obtain maximum service life.

Avoid shock and vibrations (e.g. from other pumps) when the pump isrunning. Shocks perpendicular to the rotation axis are particularly harm-ful. If the pump appears to be running in the mechanical bearings con-tinuously it is switched off.

Do not suddenly expose the MAG to an already evacuated vacuumchamber. The pressure surge may cause the rotor to make contact withthe touch-down bearings. This will cause increased wear.

Do not disconnect the MAG and MAG.DRIVE while they are operating.If MAG and MAG.DRIVE have been disconnected accidently re-connectthem.

Do not stop the MAG with the mains. Use the STOP key or a stop com-mand. Switching off the mains while the pump is running will wear outthe touch down bearings.

The pump may make noise during the run-up and run-down phases. Thishas neither an influence on the pump nor on the process.

Monitor the purge gas continuously.

Insufficient purge gas flow can result in:

Process gases entering the motor and bearing area of the MAG

Process gases escaping from the purge gas valve

Humidity entering the pump.

Refer to Section 2.6.

The pump can become so hot during operation that it representsa burn hazard:

Warning

Warning

Protecting the touch-down bearings

VentingAs to suitable gases, see Section 2.6.

Venting MethodThe pump must be vented via the purge gas and venting valve or thevent port when shutting the pump down.

When additionally venting the vacuum chamber, the venting function of thepurge gas and venting valve must be opened before opening the chambervalve. This will ensure the presence of a higher pressure in the magneticbearings compared to the remaining vacuum area. This will prevent parti-cles, dust or aggressive gases from being forced into the not yet ventedmotor chamber of the pump.

Speed of the pressure riseAll turbomolecular pumps may be vented at full speed. However, the pres-sure must not increase faster than specified through the pressure risecurve.

The pump must be vented significantly slower when there is the risk of par-ticles entering into the pump from the process. During venting, the flowmust be of the laminar type in both the vacuum chamber and the turbo-molecular pump.

The pump must not be vented to pressures above atmospheric pressure.

GA05135_0502 - 09/200460

Operation

103

mbar

102

101

100

10-1

10-2

10-3

Fig. 47 Curve for safe venting of the MAG;pressure rise as a function of venting time

0 10 20 30 40 50 60Time/s

Fore

vacu

umpr

essu

re

GA05135_0502 - 09/2004 61

Operation

3.2 Temperature ManagementSystem

Function description

The TMS is only in function, when a MAG CT version is connected. Theheater will be activated when the mains is switched on. The TMS controlsthe heating and water cooling to maintain the pump at the specified setpo-int temperature.

Settings

The temperature (TMS) setpoint can be programmed via the front panelkeys when the pump stands still.

Principally the factory presetting will be used. The setting is saved in thepump’s memory chip. Before changing any setpoint value request Leybold!

For the setting refer to 3.9.4 Operating menu, Settings TMS.

Heat up

The setpoint temperature will be reached within 30 to 60 minutes depen-ding on cooling water temperature and flow. If the flow is very high and thetemperature low a high temperature setpoint might not be reached. Fortemperature sensitive applications observe the cooling water specifications(refer to Section 1.6 and 2.5).

In order to guarantee correct temperature setting of the pump it isrequired to provide the cooling water within the envelope descri-bed in Section 2.5.

TMS status code

The TMS status code is displayed on the operation display.

No. Code Description

1 H Heating pump

2 H O K Temp. TMS ok, heater ON

3 O K Temp. TMS ok (range Tset ± 2K)

4 C O K Temp. TMS ok, cooling ON

5 W Warning Temp. TMS

O F F TMS cancelled via control plug X14

Caution

only for MAG ... CT

GA05135_0502 - 09/200462

Operation

Actual temperature

The actual temperature is displayed on the operating display (refer to 3.9.1Operating menu, Basic menu)

Signal TMS OK

If the actual TMS temperature lies in the range ±5K from the setpoint tem-perature, the TMS OK signal can be output via the option relay. The optionrelay must be programmed for this function (refer to Section 2.7.3 Controlplug X14, Relay outputs)

Warning message (Temp > Tset+5K)

If the actual temperature exceeds the warning temperature the converterdisplays the message:

WarningTMS

T - 5 K

T - 2 K

T + 2 K

T + 5 K

2)

2)

T + 15 K

1) 1 2 3 2 3 4 3 2 2 133 4 455

Sollwert TMS

TMS Code

Heizung EIN

Kühlung EIN

TMS OK

Warnung TMS

Störung TMS

1) The TMS status code is displayed on the operation display; see Section 4.2) Heater or cooling active

Fig. 48 Function diagram TMS for the MAG.DRIVE 2000

TMS Code

Heater ON

Cooling ON

TMS ok

Warning Temp. TMS

Failure TMS 5

Setpoint temp. T

GA05135_0502 - 09/2004 63

Operation

3.3 Operation at high gasthroughput or high forevacuumpressure

In the operating software, the alarm triggers for the service life of the rotorhave been defined. After this service life period has elapsed the rotor needsto be replaced. The alarm thresholds have been derived from the applica-tions known to date.

Continuous operation at a high motor current will reduce the ser-vice life of the rotor. In such cases additional safety measuresneed to be introduced which must be co-ordinated with Leybold.

Also warming up of the rotor due to other influences will reduce itsservice life, for example, pumping of hot process gases.

Turbomolecular pumps contain a large amount of kinetic energydue to the high rotational speed in combination with the mass oftheir rotors. In case of a malfunction of the system for examplerotor/stator contact or even a rotor crash the rotational energymay be released.

In most applications the motor current will remain during continuous ope-ration below the permitted maximum value. The alarm thresholds havebeen selected in consideration of this maximum value. Depending on theoperation conditions the maximum service life of the rotor is 40,000 h. Theoperation conditions depend on type of the gas, throughput and pressure.With high gas load, especially when pumping Ar and SF6, the maximumservice life of the rotor may be shorter. In this case we must ask you to con-sult us.

Also ensure that the high vacuum flange cannot warm up above the per-missible temperature level.

3.4 BakeoutOnly for pumps with CF flange

If pressures in the range of 10-8 mbar or below are to be developed, thevacuum chamber and the components installed therein will have to bebaked out.

Protect the rotor against intensive, direct heat radiation. When baking outat the forevacuum side – at a sorption trap, for example – ensure that thecomponents attached direct are not heated to more than 80 °C.

The forevacuum pump must be in operation so as to eliminate the vaporsliberated at the sorption trap.

The maximum bakeout temperature of the pump is 120 °C.

Warning

GA05135_0502 - 09/200464

Operation

3.5 Operation with the START andSTOP keys

Switching on

Switch on the MAG.DRIVE 2000.

The MAIN LED lights green. Wait for approximately 20 to 30 seconds untilthe MAG.DRIVE has been initiated.

If the pump has the optional TMS (including e.g. the red heater band) theheater will be activated. The setpoint temperature will be reached within 30- 60 minutes depending on cooling water temperature and flow.

In case of corresponding connection the backing pump will be activatedwhen switching on the MAG.DRIVE 2000.

Open the purge gas supply. With a converter with default settings thepump’s purge gas valve is open.

Open the cooling water supply.

Press the START key.

The pump runs-up. The STATUS LED is slowly flashing green. When theSTATUS LED is lit permanently green the pump is in normal operation.

Switching off

Press the STOP key.

The STATUS LED is fast flashing green. When the STATUS LED is off thepump has come to a standstill.

Close the cooling water supply when the pump is switched off in orderto avoid condensate formation in the pump.

The backing pump may be switched off once the MAG has stopped.

If the MAG has been used for pumping corrosive gases it should be pur-ged with dry nitrogen for one hour before switching off. During down timesof the system take care that neither ambient air nor cleaning agents enterthe pump.

After a failure has occured and has been removed, acknowledge the failu-re message by pressing the STOP key.

Purge with dry nitrogen

GA05135_0502 - 09/2004 65

Operation

Significance of the lamps

COM (green)Is lit if communication has been established via the interface.

STATUS (green/red)Red, steady light = FailureRed, flashing = WarningGreen, flashing (slow) = Start delay, AccelerationGreen, flashing (fast) = Deceleration, Kinetic bufferingGreen, steady light = Normal operation

MAIN (green)This lamp is lit if the power is switched-on, and all of the supply voltages foroperation are available.

Flashes when the power fails as long as the power supply voltages in theconverter are maintained by the kinetic buffering.

3.6 Remote controlThe pump can be switched-on or off using the START/ STOP keys or viacontrol connector X14.

X14.11 not connected = Start/Stop via the operator control panel

Jumper X14.11-X14.10 = Start/Stop via control input X14.12

Remote

Start

Masse

X1.1

X1.2

X1.3

Switch closed: STARTSwitch open: STOP

Remote X14.11

Start X14.12

GND X14.10

Fig. 49 Connecting-up example remote control

GA05135_0502 - 09/200466

Operation

0

1

P12

0

1

2

S

R

Q

Q

&

-1

s

0

1

2

≥1

≥1

START

REMOTE

+15 V

X14.11

X14.12

X14.10

P36

= 1X14.48

X14.47

Shutdown

Start delay time

STARTpump

STOPpump

(braking the pumpwith the pulsed resistor)

STARTkey pad

STOPkey pad

STOPinterface

STARTinterface

NoFailure

Operating mode:Programming only via

serial interface

Failurescausesbraking operation

0 V = 015 V = 1

~ 3 kOhm

m

Fig. 50 Function diagram START/STOP

GA05135_0502 - 09/2004 67

Plug-in control

3.7 Operation with plug-in controlObserve the general operation rules given in Section 3.1 to 3.4.

Switching on Switch on the MAG.DRIVE 2000. The display reads after approximately

20 to 30 seconds

Ready0.0 A 0 Hz

If the pump has the optional TMS (including e.g. the red heater band) theheater will be activated. The setpoint temperature will be reached within 30- 60 minutes depending on cooling water temperature and flow.

In case of corresponding connection the backing pump will be activatedwhen switching on the MAG.DRIVE 2000l. Open the purge gas supply.

Open the cooling water supply.

Press the START key.

The pump runs-up.

Acceleration20.0 A 250 Hz

is diplayed until the frequency setpoint has been reached. Then

Normal Operation1.0 A 600 Hz

is displayed.

GA05135_0502 - 09/200468

Plug-in control

Switching off

The MAG.DRIVE 2000 controls the venting automatically provided purgegas is connected to the MAG and the MAG.DRIVE 2000 is programmedcorrespondingly (“Vent on”). Press the STOP key.

Deceleration20.0 A 400 Hz

will be displayed. When the display reads

Ready0.0 A 0 Hz

the pump has come to a standstill.

Close the cooling water supply when the pump is switched off in orderto avoid condensate formation in the pump.

The backing pump may be switched off once the MAG has stopped.

If the MAG has been used for pumping corrosive gases it should be pur-ged with dry nitrogen for one hour before switching off. During down timesof the system take care that neither ambient air nor cleaning agents enterthe pump.

3.8 Operating statuses

Switch-On Guard

The converter goes into the “Switch On Guard” operating status after thepower is switched on and after initialization. If there is no warning or failu-re, it changes over into the “Ready” condition.

After a failure has been acknowledged, the converter goes into the “SwitchOn Guard” operating status. The failure must be acknowledged a secondtime, so that it then goes into the “Ready” condition.

Ready

The converter is ready and waits for the START command. All parameterscan be interrogated or changed via the operator control panel or the serialinterface.

The basic menu parameters (refer to 3.9, Operating menu) can be scannedvia the operator control panel.

Acceleration

The pump continuously accelerates with the maximum current. The acce-leration time is monitored to ensure that it lies within a programmed value(refer to the menu “settings pump/Accel. Time”). If the converter hasn’t rea-ched the normal operating mode during the monitoring time, then it is shut-down with the failure message “Accel. Time”.

Normal operation

After a programmable frequency threshold has been reached (refer to themenu “settings pump/Normal Operation”), the converter goes into the nor-mal operation mode but the pump continues to accelerate up to the fre-quency setpoint.

Purge with dry nitrogen

GA05135_0502 - 09/2004 69

Plug-in control

Start Stop

Esc Mon Prog Enter

+_

Acceleration

17.5A 254Hz HOK

Key Function

Esc Returns to the operating display from the storage procedurewithout storage.

Returns to the operating display from any point of the basicmenu.

Mon No function

Prog Selects the programming menu from the operating display. Confirms to store changed parameters to the EEPROM

Enter Switches forward to the next submenu

Start Starts the pump (only possible if there is no fault).The start key is only active if the user is in the basic menu or in the operating display.

Stop Stops the pump Returns to the operating display from the programming menu. Acknowledges a failure after the cause of the failure has

been removed.

+ Increases a parameter value or proceeds to the next option.

– Lowers a parameter value or returns to the previous option.

< Selects the programming menu from the operating display. Switches back to the last main menu.

> Selects the programming menu from the operating display. Switches forward to the next main menu.

Fig. 51 Functions of the front panel keys

Operating display TMS status code*

No. Code Description

1 H Heating pump

2 H O K Temp. TMS ok, heater ON

3 O K Temp. TMS ok (range Tset ± 2K)

4 C O K Temp. TMS ok, cooling ON

5 W Warning Temp. TMS

O F F TMS cancelled via control plug X14

see also Section 3.2. „TMS“

* only for pumps with TMS

Fig. 52 Display

Acceleration17.5A 254Hz HOK

Operating status

Motor current / Actual frequency / TMS status code

If a critical operating status occurs this warning isdisplayed alternating with the operating display.

FailureAccel. Time

Failure message

Failure cause

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Plug-in control

Overload

The speed is continuously monitored and controlled. If the speed, even atmaximum current, cannot be held at the setpoint, as a result of externalinfluences, e.g. excessive gas intake, the speed reduces until the convertergoes into the “Overload” operating condition when the programmable fre-quency threshold is fallen below (refer to the menu “settings pump/NormalOperation”). The acceleration time is restarted. If the converter hasn’t goneinto the normal operating mode after the monitoring time, it is shutdownwith the failure message “Failure Overload Time”.

Mains Down

If the power fails while the pump is running the pump generates the powernecessary to operate the MAG.DRIVE up to a minimum frequency of 170Hz. When the power returns, the pump is again accelerated up to the fre-quency setpoint.

The acceleration time is now restarted. If the converter hasn’t gone into thenormal operating mode after the monitoring time, it is shutdown with thefailure message “Accel. Time”.

If the system is running in the normal operation mode, then in the case ofan occurring mains failure the corresponding relay contact "Normal opera-tion” will be disabled with a delay. Brief mains voltage interruptions of lessthan five seconds will not have an influence on the relay output provided thespeed of the pump does not drop within this time span below the speedlimit set up through the normal operation factor or if a stop process wasinitiated.

Deceleration

After a stop command, the pump is braked down to a speed < 1 Hz asquickly as possible. A brake resistor is integrated into the converter whichconverts the regenerative energy into heat.

Failure

The converter was shutdown with a failure message and waits for a failureacknowledgement after the failure has been removed. The failure type canbe read from the display. The failure message can be acknowledged bydepressing the STOP key or via the digital input “option”, when the pumpstands still.

GA05135_0502 - 09/2004 71

Plug-in control

Abb 53 Diagram: Operation status

> 5 s

Mains switched on

Initialization

Switch On Guard

Acceleration

Normal Operation Mains Down

Overload

Deceleration

Failure

After a failure, quit a second time

START command

Mains ok

Frequency > P 25 x P24

Mains failure

Mains failure

Frequency > P25 x P24 Frequency < P25 x P24

Mains failure

STOP command

If a failure occurs the pump is decelerated

Frequency < 1 Hz

Failure occurs

Failure acknowledgement

only possible if f<5 Hz

Ready

Start Delay

STOP command

Parameter:P24 = Frequency setpointP25 = Factor normal operation

GA05135_0502 - 09/200472

Plug-in control

3.9 Operating menu

3.9.1 Basic menu

Menu item Description Adjustable value / option Ac-cess

min. max. stan- Unitvalue value dard

Ready Operating display - - - - -

Freq. Setpoint Sets the speed for operation 150 480 480 Hz r/w!! Every change is directly writteninto the pump’s data storageand is valid immediately!!

Operation Hours** Total operating hours of the pump actual value h r(permissible operating hours)

Count of Starts** Number of Start/Stop cycles actual value - r(permissible No. of Start/Stop cycles

Motor Temp. Motor temperature actual value °C r

Converter Temp. Temperature of the power actual value °C relectronic

Bearing Temp. Temperature of the magnetic actual value °C rbearing

Actual Value TMS Temperature of the Temperature actual value °C rManagement System

Cooling Temp. Cooling water temperature actual value °C r

Actual PVW 13 Rotor displacement in the magnetic bearing actual value % rplane VW13

Actual PVW 24 Rotor displacement in the magnetic bearing actual value % rplane VW24

Actual PZ 12 Rotor displacement in the magnetic bearing actual value % raxis Z12

Power Power consumption of the drive actual value W r

Software Version Actual software version actual value - r

** For the permissible number of operating hours/start cycles the system provides two thre-sholds. Exceeding these thresholds will result in a warning message (default) or an alarmmessage. The corresponding menu entry for setting up the required response can be foundin the section "Programming the frequency converter”.

Threshold for system start If before starting the system the threshold is already exceeded, starting the system will no longer be possible.

Threshold during operation The permissible threshold during operation is higher compared to the threshold which is permissible during system start. The permissible number of this value is indicated through the display (YYY).

r (read) = Value can only be readr /w (read/write) = Value can be read and written

Ready0.0 A 0 Hz

Enter

Freq. Setpoint480 Hz

Enter

Operation HoursXXXXXX (YYYYYY)

Enter

Motor Temp.50 °C

Enter

Converter Temp.40 °C

Enter

Bearing Temp.50 °C

Enter

Actual PVW 1310%

Enter

Actual PVW 2410%

Enter

Actual PZ 125%

Enter

Power400 W

Enter

Not Active

Actual Value TMS63 °C

Enter

Not Active

Cooling Temp.20 °C

Enter

Software Versionxxx.xx

Enter

Count of StartsXXXXXX (YYYYYY)

Enter

GA05135_0502 - 09/2004 73

Plug-in control

3.9.2 Settings converter

Menu item Description Adjustable value / option Ac-cess

min. max. stan- Unitvalue value dard

Option Relay 1 Relay with change-over Threshold bearing (Relay 6) contact; the operator can temperature reached °C r/w

select one of the functions Threshold motor described current reached A

Threshold frequency the thresholds are adjusted reached Hzin the following menu items No cooling water -

no purge gas -TMS temperature o.k. -

Vent -Start command applied-Power supply o.k. -Pump standstill -

Option Relay 2 Start command applied -(Relay 7)

Option Relais 3 Power supply o.k. -(Relay 8)

Option Relais 4 Pump standstill -(Relay 9)

Threshold Threshold bearing temp. 0 100 60 °C r/wfor option relay

Threshold Threshold motor current 0 20 10 A r/wfor option relay

Threshold Threshold frequency 0 480 300 Hz r/wfor option relay

Analog Output Analog output 0...10V; Motor current; the operator can select 20 A =10Vxscale V r/wone of the functions Act. frequency ; described 500 Hz = 10Vxscale V

Bearing temp.; 100 °C = 10Vxscale VActual PVW13; 100% = 10Vxscale VActual PVW24; 100% = 10Vxscale V

Actual PZ12; 100% = 10Vxscale V

Scale Factor Scale factor for the analog output 0 2 1 - r/w

Analog Input 2 Analog input 0...10V ; No function - r/woptionally frequency setpoint via analog input 2 Function frequency (10V = max. frequency setpoint) setpoint -

Start Delay Waiting time between start command and acceleration 0 1200 0 s r/w

Display Display language English - r/wGerman -

Bus Address Bus adress for the converter by operation via 0 31 0 - r/wserial interface RS232/485

Op.Hours/Cycles In the case of "Warning”, a warning Warning (Default) - r/w will be displayed as soon as the Alarmnumber of permissible operating hours or cycles is exceeded; in the case of "Alarm” the system is shut down or a restart is prevented.

The setttings of the option relays 2to 4 can be changed similar tooption relay 1 but they cannot bestored in the pump’s data storagedevice. After each power off theoption relays 2 to 4 are in thedefault state.

Pump Standstill

Power Supply OK

German

Start Command

Enter

Threshold60 °C

Enter

Threshold10.0 A

Enter

Threshold300 Hz

Enter

Actual PZ12

Actual PVW24Actual PVW13

Bearing Temp.Actual Frequency

Analog OutputMotor Current

Enter

Scale factor1.0 x

Enter

Freq. Setpoint

Analog Input 2No Function

Enter

Start Delay0 s

Enter

DisplayEnglish

Enter

Bus Address0

Enter

Enter

Option Relay 3Power Supply OK

Enter

Option Relay 4Pump Standstill

Enter

Option Relay 2Start Command

VentTMS OK

No Purge GasNo Cooling Water

Frequency

Set Converter

Enter

Motor Current

Option Relay 1Bearing Temp.

Op.Hours/CyclesWarning

Enter

GA05135_0502 - 09/200474

Plug-in control

3.9.3 Settings pump

Menu item Description Adjustable value / option Ac-cess

min. max. stan- Unitvalue value dard

Normal Operation Threshold for normal operation corresponding to the 35 99 95 % r/wfrequency setpoint

Max. Accel. Time Monitor time for accelerationand overload 600 3600 1000 s r/w

Pump Type Displays the installed pump type Installed pump type - r

3.9.4 Settings temperature managementsystem

Menu item Description Adjustable value / option Ac-cess

min. max. stan- Unitvalue value dard

TMS Setpoint Setpoint Temperature- 20 62 62 °C r/wManagement-System

3.9.5 Settings purge / vent

Menu item Description Adjustable value / option Ac-cess

min. max. stan- Unitvalue value dard

Purge / Vent The operator can select one Purge OFF - r/wof the beside standing Purge ON -options for purge and vent Controlling purge / vent

via control plug X14 -

Option P / V Displays the factory installed option for purge and vent Installed option - r

Set Pump

Enter

Normal Operation95 %

Enter

Max. Accel. time800 s

Enter

Pump TypeMAG 1600/2000 CT

Enter

Set TMS

Enter

TMS Setpoint60 °C

Enter

Via X14Purge ON

Set Purge/Vent

Enter

Purge/VentPurge OFF

Enter

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GA05135_0502 - 09/2004 75

Plug-in control

3.9.6 Total view of the menu

Table A “Option relays”Function of the option relays

Refer to Set Converter/Relay option (section 3.9.2). There are 4 option relays (relay 6...9) with change-over contact; the operator can select one of the functionsdescribed in the following table.If the condition of the selected functions is performed, the selected relay switches over.

Bit Setting Condition0 Bearing Temp. Bearing Temp. (P125) > Treshold bearing temperature

1 Motor Current Motor Current (P5) > Treshold motor current

2 Frequency Frequency (P3) > Treshold frequency

3 No Cooling Water Cooling Temp. (P127) > Shut down temperature

4 No Purgegas Pumptype = C, CT and Function purge/vent = off

5 TMS temp. OK ((TMS on) and (TMS Setpoint -5 < TMS temp. (P123) < TMS Setpoint +5))

6 Venting Pumptype = C, CT and venting

7 Pump standstill Frequency (P3) < 2 Hz

8 Start Command Start command is applied

9 Power supply OK Power supply OK

Table B “Parameters for the analog output”Typical parameter numbers

Parameter Description min value max value unit3 Frequency 0 1000 Hz

5 motor current 0 200 0.1 A

125 bearing temp. 0 140 °C

220 rotor displacement in the mag. bearing plane VW13 0.00 199.99 %

221 rotor displacement in the mag. bearing plane VW24 0.00 199.99 %

222 rotor displacement in the mag. bearing axis Z12 0.00 199.99 %

Example: P/N Analog Out (section 3.9.4) is set to parameter P125 (bearing temp.).

Definition: UAna_out = P125current / P125max value * Scale factor * 10 V

P125current = UAna_out / P125max value / Scale factor / 10 V

P125 (bearing temp.) / °C Scale factor Analog out UAna out / V

20 1.00 1.43

40 2.50 7.14

75 1.87 10.00

100 1.00 7.14

GA05135_0502 - 09/200476

Plug-in control

GA05135_0502 - 09/2004 77

Maintenance

4 Maintenance4.1 CleaningIf required clean the turbomolecular pump and the frequency converter ofdust with a dry cloth.

4.2 Changing the rotorThe rotor has to be changed at the latest

- after 40,000 hours of operation or

- after 5000 starts/stops.

See also Section “3.3 Operation at high gas throughput or high forevacu-um pressure”.

Due to high-speed and temperature, the service life of the rotor islimited.

If the rotor is changed too late, it may be destroyed. Thus in theflange mounts high forces and torque conditions can occur.

The mounting screws for the pump may be torn off. Whenusing clamped flange connections at the housing or with compo-nents above the housing, sudden twisting of the entire pump canbe experienced.

The pump’s operating hours are displayed at the frequency converter (seeSectiont 3.9.1 ).

A warning is displayed after 37,000 operating hoursor 3700 starts/stops.

Only the Leybold service can change the rotor.

4.3 Changing the touch downbearings

Wear occurs at the touch-down bearings when hard shocks have to besupported.

Maintenance is also required after removing the bearing cable during ope-ration of the pump. Under these conditions the rotor can not be controlledby the magnet bearing and the pump will have a full run down on the touchdown bearing.

Only the Leybold service can change the touch-down bearings.

Warning

GA05135_0502 - 09/200478

Maintenance

4.4 Cleaning the frequencyconverter internally

Depending on the installation site the converter may collect grime (dust,moisture) on the inside. Such contamination may lead to malfunctions,overheating or short circuits. Therefore the converter must be cleaned after5 years.

Only the Leybold service can clean the converter internally.

4.5 Removing the pump from thesystem

MAG which have been used in semiconductor processes are contamina-ted by semiconductor process gases. Most of these gases form acidswhen exposed to moist air which causes serious corrosion damage to thepump.

In order to prevent corrosion damage in the case of MAGs which have beenremoved, the pump needs to be packaged in a sealed package. For thisthe shipping package of the replacement pump may be used, for example.

Failure to seal a contaminated MAG voids the warranty.

For safety reasons we recommend to use a metal seal kit (see Fig.54) for shipping of contaminated pumps.

Proceed as follows to seal the turbomolecular pump immediately afterremoving it from your process.

Purge the pump for two hours with the backing pump running. This helpsto remove a large quantity of the process gases from the pump. We recom-mend purging the pump via the intake flange and the purge valve withapprox. 200 sccm.

Press the STOP button at the MAG.DRIVE 2000 and wait until the pumphas come to a standstill.

Afterwards turn the mains switch to the “0” position.

The cables between the MAG and MAG.DRIVE may be disconnected onlyafter the MAG has come to a full stillstand and the mains is switched off.

When the pump has been pumping hazardous gases, ensure thatproper safety precautions are taken before opening the intake orexhaust connections.

Use gloves or protective clothing to avoid skin contact with toxicor highly corrosive substances. Work under a fume hood if availa-ble.

Disconnect the cables from the pump.

Disconnect the cooling water lines. Remaining cooling water may flow out.Protect all parts below.

Remove all bolts but 2 which hold the intake flange. The 2 remaining boltsmust be directly opposite.

Disconnect the forevacuum line.

Warning

Warning

GA05135_0502 - 09/2004 79

Maintenance

Fig. 54 Sealing the MAG tightly with the metal seal kit

bolts

collar flange

retaining ring

blank flange

centering ring with O-ring

desiccant

nuts

sealing disc

screwed sealing plugfor purge gas connec-tor (only for MAG W2010)

cap

polyethylene bag with cable tie

desiccant

centering ring with O-ring

blank flange

clampingring

GA05135_0502 - 09/200480

Maintenance

Support the pump with a lift-truck at the base plate and remove the 2remaining bolts.

Clean the intake and forevacuum connection flange as necessary for goodadhesion of tape.

Place the dry cartridge into the forevacuum port. Don’t use loose crystals.

Firmly seal all ports with plastic adhesive film.

Cover the forevacuum connection port with its plastic cap.

Seal the high-vacuum connection flange with the cover and the screws.

Pack the pump so that it may not be damaged during transportation.Particularly protect the flanges, the cooling water connectors and the cur-rent feedthrough.

4.6 Service at Leybold’sIf you send a pump to Leybold indicate whether the pump is free of sub-stances damaging to health or whether it is contaminated. If it is contami-nated also indicate the nature of hazard. To do so, you must use a pre-printed form which we shall send to you upon request.

A copy of this form is printed at the end of the Operating Instructions:“Declaration of Contamination of Vacuum Equipment and Components”.Another suitable form is available from the Leybold homepage:

http://www.leyboldvac.de under the headline “customer service”.

Either fasten this form at the pump or simply enclose it to the pump.

Don’t pack the form with the pump into the PE bag.

This declaration of contamination is necessary to comply with legal requi-rements and to protect our staff.

Leybold must return any pump without a declaration of contamination tothe sender’s address.

4.7 DisposalThe pump may be contaminated by the process or by environmentalinfluences. In this case it must be decontaminated in accordance with therelevant regulations. Leybold offers this service for fixed prices. Furtherdetails are available on request.

Contaminated parts can be detrimental to health and environ-ment. Before beginning to work, find out whether any parts arecontaminated. Adhere to the relevant regulations and take thenecessary precautions when handling contaminated parts.

Separate clean components according to their materials, and dispose of.Leybold offers this service free of charge. Further details are available onrequest.

If you send a pump to Leybold mind the regulations given in Section “4.6Service at Leybold´s”.

Contamination

Seal all ports

Warning

Contamination

Form

GA05135_0502 - 09/2004 81

Troubleshooting

Warning

5 TroubleshootingIn case of a malfunction, the MAG will be braked and the first line of thedisplay shows

FAILURE

Malfunction messages can be cancelled once the pump has come to astop and after the malfunction has been rectified; do so with the STOPfunction (button or remote control).

The MAG shall be stopped completely and the mains power corddetached before you open the MAG.DRIVE. Since dangerous vol-tages may nonetheless be encountered, the housing must beopened only by a qualified electrician.

GA05135_0502 - 09/200482

Troubleshooting

Warning Message on Display

Motor Temp.

Temperature sensor insidethe motor reads a highertemperature value than thewarning threshold (100 °C).

Bearing Temp.

Temperature sensor insidethe pump reads a higher tem-perature value than the war-ning threshold (68 °C).

Converter Temp.

Temperature sensor inside ofthe converter reads a highertemperature value than thewarning threshold (70 °C).

Cooling Temp.

Temperature sensor at coo-ling water block reads a hig-her temperature value thanthe warning threshold (45 °C).

Operation Cycles

The registered number ofstart cycles exceeds the per-missible number (normal war-ning threshold). So as not toconstantly mask this warningby others, it is only displayedduring run-up (up to approxi-mately 150 Hz).

The registered number ofstart cycles exceeds the per-missible number (warningthreshold 2). The warning isnow displayed constantly.

Pump. Op. Hours

Measures

Take the actual motor temperature readingfrom the display; see Section 3.9.1.Reduce gas load. If the warning persists con-tact Leybold service.

Contact Leybold service.

Apply cooling water according to specifica-tions. Check cooling water tubes for deposits.See also Section 2.6.

Allow pump to cool down between thecycles.

Check chamber temperature.

If the red LED at the water valve is ondisconnnect and connect the connector. Thevalve must make noises. If not contactLeybold.

Allow converter to cool down between thecycles.

Refer to Section 2.7 for the correct mountingof the converter in a rack; max. ambient tem-perature 45 °C.

Apply cooling water according to specifica-tions. Check cooling water tubes for deposits.See also Section 2.5.

Make a service date.

Make a service date.

Possible Cause

Motor temperature exceeds the warningthreshold e.g. due to a high gas load.

Drive failure or internal converter failure.

Cooling water flow too low or coolingwater temperature too high.

Frequent acceleration and deceleration ofthe pump.

Temperature at the high-vacuum connec-tion flange or at the isolation valve ismuch higher than 85 °C.

Water valve malfunction.

Frequent acceleration and deceleration ofthe pump.

No sufficient air circulation.

Cooling water flow too low or coolingwater temperature too high.

High number of starting processes.

This section will only be active providedthe menu item "Operating Hours/Cycles”remains set to "Warning”.

The operating time of the pump attainsthe pre-set warning threshold.

5.1 Warning messages

GA05135_0502 - 09/2004 83

Troubleshooting

Warning Message on Display

TMS

TMS temperature sensorreads a temperature higherthan the TMS setpoint +5 °C.

Unbalanc. PVW13Unbalanc. PVW24Unbalanc. PZ12

A rotor displacement excee-ding the warning thresholdoccured. The code designa-tes the affected axis.

Overload

The rotational speed droppedbelow normal operation fre-quency.

Mains down

The converter is in the gene-rator mode.

Op. Without Purge

The warning indicates that aC/CT type of pump is opera-ted while the purge gas valveis closed.

Protection

The pump drive is blocked.

PK Communication

Converter does not commu-nicate with the memory chipinside of the pump.

Measures

Apply cooling water according to specifica-tions. Check cooling water tubes for deposits.See also Section 2.6.

Check the TMS setpoint (default 62 °C). Forthe correct setting refer to Section 3.9.4.

Check chamber temperature.

If the red LED at the water valve is ondisconnnect and connect the connector. Thevalve must make noises. If not contactLeybold.

If warning message persists contact Leyboldservice.

Check the chamber pressure during opera-tion.

Contact Leybold service.

Reduce backing pressure. Additionally, checkprocess gas flow.

Set parameter “Normal Operation” to default95%. Refer also to Section 3.9.3.

Reconnect converter to the mains.

Switch on the converter.

Set purge gas function to Purge ON. (Keypanel or control connector X14).

Deactivate “Emergency off” via control plugX14.

Check BEARING connector and cable fordamages or bent pins. Contact Leybold servi-ce if the cable is damaged.

Contact Leybold service.

Possible Cause

Cooling water flow too low or coolingwater temperature too high.

Wrong TMS temperature setpoint.

Temperature at the high-vacuum connec-tion flange or at the isolation valve ismuch higher than 85 °C.

Water valve malfunction.

Mechanical shocks, perhaps due to toolmaintenance.

Shock venting.

Converter failure.

Backing pressure too high during opera-tion.

Parameters “Normal Operation” are notset correctly.

Mains interrupted or converter switchedoff during operation of the pump.

Purge gas function disabled.

Emergency off active.

BEARING cable damaged.

Memory chip inside of magnetic bearingcartridge malfunctioning.

WarningThe frequency converter does not write any operatinghours and starting cycles data into the memory chip ofthe pump. Ensure that the pump does not exceed thepermissible number of operating hours or start cycles.

GA05135_0502 - 09/200484

Troubleshooting

Failure Message on Display

Motor Temp.

Temperature sensor insidethe motor reads a highertemperature value than thefailure threshold (100 °C).

Cooling Temp.

Temperature sensor atcooling water block readsa higher temperature valuethan the failure threshold(55 °C).

Measures

Acknowledge failure message.

Take the actual motor temperature reading from thedisplay; see Section 3.9.1.Reduce gas load. If the warning persists contactLeybold service.

Step 1: Check pump (temperature sensor)

Check pump connector X23. In particular measureresistance between pins X23/x and X23/w. The resi-stance is typically 2kΩ ± 1 %. In case of abnormalvalues (> 3.4 kΩ) are measured contact Leybold ser-vice.

Step 2: Check BEARING cable

If step 1 was successful do the following:

Check BEARING cable for bent pinsMeasure the resistance between pins X20/x andX20/w with the cable connected to the pump. Theresistance is typically 2kΩ ± 1 %.

Replace the cable if it is damaged or in case themeasurement of the resistance shows abnormalvalues (> 3.4 kΩ) now.

Contact Leybold service.

Apply cooling water according to specifications.Check cooling water tubes for deposits. See alsoSection 2.5.

Step 1: Check cooling water temperature sensor

Check pump connector X30. In particular measureresistance between pins X30/S and X30/V. The resi-stance is typically between 110 Ω and 130 Ω (20 °Cto 70 °C).

Step 2: Check TMS cable and connectors

If step 1 was successful do the following:

Check TMS cable for bent pinsMeasure the resistance between pins X26/W andX26/V with the TMS cable connected to the pump.The resistance is typically between 110 Ω and 130 Ω(20 °C to 70 °C).

Replace TMS cable if it is damaged or in case themeasurement of the resistance shows abnormalvalues now.

Contact Leybold service.

Possible Cause

Motor temperature exceeds the failurethreshold e.g. due to a high gas load.

Motor temperature sensor defective.

BEARING cable or connector dama-ged.

Converter failure.

Cooling water flow too low or coolingwater temperature too high.

Pt 100 (cooling water temperaturesensor) damaged.

TMS cable or connectors damaged.

Converter failure.

5.2 Failure messages

GA05135_0502 - 09/2004 85

Troubleshooting

Failure Message on Display

Bearing Temp.

Temperature sensor insidethe pump reads a higher tem-perature value than the failurethreshold.

Converter Temp.

Temperature sensor inside ofthe converter reads a highertemperature value than thefailure threshold (90 °C).

Overload PZ 12Overload PV 13Overload PW 24

An abnormal displacement ofthe rotor occured at frequen-cies between 0 and 5 Hz.The code designates theaffected axis.

Measures

Apply cooling water according to specifica-tions. Check cooling water tubes for deposits.See also Section 2.5.

Allow pump to cool down between the cycles.

Step 1: Check pump (temperature sensor)

Check pump connector X23. In particularmeasure resistance between pins X23/v andX23/u as well as between pins X23/v andX23/t. The resistance is typically between 110Ω and 130 Ω (20 °C to 70 °C). In case abnor-mal values are measured contact Leybold ser-vice.

Step 2: Check BEARING cable

If step 1 was successful do the following:

Check BEARING cable for bent pinsMeasure the resistance between pins X20/vand X20/u as well as between pins X20/v andX20/t with the cable connected to the pump.The resistance is typically between 110 Ω and130 Ω (20 °C to 70 °C).

Replace the cable if it is damaged or in casethe measurement of the resistance showsabnormal values now.

Check chamber temperature.

If the red LED at the water valve is on disconn-nect and connect the connector. The valvemust make noises. If not contact Leybold.

Contact Leybold service.

Allow converter to cool down between thecycles.

Refer to Section 2.7 for the correct mountingof the converter in a rack; max. ambient tem-perature 45 °C.

Contact Leybold service.

Acknowledge failure message and restart thepump. If failure message persists contactLeybold service.

Remove transport seal; see Section 2.3.

Check BEARING connector and cable for bentpins. Contact Leybold service if the cable isdamaged.

Consult Leybold Application Support.

Possible Cause

Cooling water flow too low or coolingwater temperature too high.

Frequent acceleration and deceleration ofthe pump.

Pt 100 (temperature sensor bearing)damaged.

BEARING cable or connectors damaged.

Temperature at the high-vacuum connec-tion flange or at the isolation valve ismuch higher than 85 °C.

Water valve malfunction.

Converter failure.

Frequent acceleration and deceleration ofthe pump.

No sufficient air circulation.

Converter failure.

Mechanical shocks, possibly due to toolmaintenance whwn the rotor stands still.

Pump is still protected with transport sealon power up.

BEARING cable or connector damaged.

Vibration influence of several pumps bet-ween each other.

GA05135_0502 - 09/200486

Troubleshooting

Failure Message on Display

MBMB, Purge ONMB, Purge OFF

An abnormal displacement otthe rotor occured at frequen-cies between 146 Hz and480 Hz.

The additional message givesinformation on the status ofthe purge gas valve themoment the failure occured. Itcan be used to estimate therun down time of the pump.

MB-Code Wrong

Magnetic bearing controllerdoes not work.

Starting Time

The frequency has not rea-ched 40 Hz 2 minutes afterthe start command was app-lied.

Accel. Time

The pump does not reach thenormal operation frequencyafter the set maximum acce-leration time.

Overload Time

The rotational speed hasdropped below normal opera-tion frequency and staysthere for longer than themaximum „Accel. Time“.

Shutdown Freq.

Rotational speed droppedbelow the shutdown frequen-cy threshold (140 Hz).

Cooling Temp. SC

The cooling water temperatu-re sensor reads a temperatu-re lower than 1 °C.

Measures

Acknowledge failure message and restart thepump. If failure message persists contactLeybold service.

Check the chamber pressure during the ope-ration. Refer to Section 3.1 for correct ventingof the pump.

Contact Leybold service.

Consult Leybold Application Support.

Contact Leybold service.

Reduce backing pressure.

Check if the rotor rotates freely. ContactLeybold service if the rotor is damaged orblocked.

Reduce backing pressure.

Set parameter “Accel. Time” to default 1000 s;see Section 3.9.3.

Reduce backing pressure. Additionally checkprocess gas flow.

Set parameter “Normal Operation” to default95 % and parameter “Accel. Time” to default1000 s; see Section 3.9.3.

Reduce backing pressure. Additionally checkprocess gas flow.

Repeat step 1 of “failure Cooling Temp.”.Contact Leybold service if the resistance of thesensor is less than 100 Ω.

Repeat step 2 of “failure Cooling Temp.”.Contact Leybold service if the resistance of thesensor is less than 100 Ω.

Contact Leybold service.

Possible Cause

Mechanical shocks, possibly due to toolmaintenance.

Shock venting.

Converter failure.

Vibration influence of several pumps bet-ween each other.

Converter failure.

Backing pressure too high during start-up.

Rotor blocked.

Backing pressure too high during start-up.

Parameter “Accel. Time” is not set cor-rectly.

Backing pressure too high during opera-tion.

Parameters “Accel. Time” or „NormalOperation“ are not set correctly.

Backing pressure too high during opera-tion.

Temperature sensor Pt 100 short-circui-ted.

TMS cable short-circuited.

Converter failure.

GA05135_0502 - 09/2004 87

Troubleshooting

Failure Message on Display

Bearing Temp. SC

The magnetic bearing tempe-rature sensor reads a tempe-rature lower than 1 °C.

Motor Temp. SC

The motor temperature sen-sor reads a temperaturelower than 1 °C.

Connection pump

Frequency XX*

Abnormal motor current orfrequency

*XX is a code no. between 43and 55. It helps the Leyboldservice to find the cause ofthe failure.

No Motor Current

TMS 1

The converter measures aheating current of less than300 mA when heater is on.

Measures

Repeat step 1 of „failure Bearing Temp.“.Contact Leybold service if the resistance of the sensoris less than 100 Ω.

Repeat step 2 of „failure Bearing Temp.“.Contact Leybold service if the resistance of the sensoris less than 100 Ω.

Contact Leybold service.

Repeat step 1 of „failure Motor Temp.“.Contact Leybold service if the resistance of the sensoris less than 1.62 kΩ.

Repeat step 2 of „failure Motor Temp.“.Contact Leybold service if the resistance of the sensoris less than 1.62 kΩ.

Contact Leybold service.

Check if the BEARING cable is connected to the pumpand the converter. Acknowledge failure message.

Contact Leybold service.

Acknowledge failure message. If failure persists contactLeybold service.

Contact Leybold service.

Check cables and connectors, straighten pins if requi-red.

Deactivate “Emergency off” via control plug X14 andacknowledge failure message.

Reconnect or replace DRIVE cable.

Step 1: Check fuse

Replace fuse TMS (F4A, 5x20 mm) if blown.

Step 2: Check pump (heating element)

Check if the connector of the heating element is con-nected.

Check pump connector X30. In particular measure resi-stance between pins X30/A and X30/B. The resistanceis typically between 70 Ω and 75 Ω. In case abnormalvalues are measured contact Leybold service.

Step 3: Check TMS/DRIVE cable

If step 2 was successful do the following:

Check TMS/DRIVE cable for bent pinsMeasure resistance between pins X21/b and X21/d withthe cable connected to the pump. The resistance istypically between 70 Ω and 75 Ω.

Replace the cable if it is damaged or in case the mea-surement of the resistance shows abnormal values now.

Contact Leybold service.

Possible Cause

Temperature sensor Pt 100short-circuited.

BEARING cable short-circuited.

Converter failure.

Temperature sensor KTY short-circuited.

BEARING cable short-circuited.

Converter failure.

BEARING cable not connec-ted.

Converter failure.

The rotor frequency exceeds515 Hz.

Converter failure.

On START command: DRIVEcable not connected or con-nectors damaged.

Resultant message after acti-vating “Emergency off”.

DRIVE cable interrupted duringoperation of the MAG.

Fuse TMS blown.

Heating element or internalpump connection damaged.

TMS/DRIVE cable or connec-tors damaged.

Converter failure.

GA05135_0502 - 09/200488

Troubleshooting

Failure Message on Display

TMS 2

The converter measures aheating current of more than4 A.

TMS 3

TMS temperature sensorreads a temperature higherthan 99 °C.

TMS 4

TMS temperature sensorreads a temperature lowerthan 1 °C.

TMS 5

TMS temperature sensorreads a temperature higherthan the TMS setpoint + 15°C.

Measures

Check the line voltage (200-240 V +10% / -15%).

Repeat step 2of failure TMS 1. In case the measuredvalue is less than 60 Ω contact Leybold service.

Contact Leybold service.

Step 1: Check TMS sensor

Check pump connector X30. In particular measure resi-stance between pins X30/F and X30/H as well as bet-ween pins X30/H and X30/G. The resistance is typicallybetween 110 Ω and 130 Ω (20 °C to 70 °C).

Step 2: Additional TMS sensor test

If temperature sensor TMS (Pt 100) has the correct resi-stance, unplug it while the pump is on power. The watervalve should open instantly with a clicking noise and ared LED inside the cooling water valve connector ligh-ting up. This LED should be on if the actual TMS tem-perature is higher than the TMS setpoint + 2 °C.

Contact Leybold service if the sensor is defective.

Step 3: Check TMS/DRIVE cable

Check TMS/DRIVE cable connector X21. In particularmeasure resistance between pins X21/K and X21/M aswell as between pins X21/K and X21/L. The resistanceis typically between 110 Ω and 130 Ω (20 °C to 70 °C).

Contact Leybold service if the TMS/DRIVE cable isdamaged.

Contact Leybold service.

Repeat steps 1 and 2 of failure TMS 3. Contact Leyboldservice if the sensor is defective.

Repeat step 3 of failure TMS 3. Contact Leybold serviceif the cable is damaged.

Contact Leybold service.

Apply cooling water according to specifications. Checkcooling water tubes for deposits. See also Section 2.5.

Repeat step 2 of failure TMS 3. Contact Leybold serviceif cooling water valve is malfunctioning.

Check the TMS setpoint (default 62 °C). For the correctsettings refer to Section 3.9.4.

Check chamber temperature.

Possible Cause

Overvoltage.

Heating element defective.

Converter failure.

TMS sensor damaged.

TMS/DRIVE cable damaged.

Converter failure.

TMS sensor short-circuited.

TMS/DRIVE cable short-circui-ted.

Converter failure.

Cooling water flow too low orcooling water temperature toohigh.

Cooling water valve malfunctio-ning.

Wrong TMS temperature set-point.

Temperature at the high-vacu-um connection flange or at theisolation valve is much higherthan 85 °C.

GA05135_0502 - 09/2004 89

Troubleshooting

Measures

Have the pump serviced.

Have the pump serviced.

Failure Message on Display

Operating Cycles

The registered number of startcycles exceeds the permissiblealarm limit during system start.The system can no longer bestarted.

Operating Hours

The number of operating hours ofthe pump has reached the pre-set alarm limit during systemstart. The system can no longerbe started.

The number of operating hours ofthe pump has reached the pre-set alarm limit. The system isautomatically shut down and canthereafter no longer be started.

Possible Cause

High number of start processes.

The alarm is only active providedthe menu item "OperatingHours/Cycles” was changed to"Alarm”.

The number of operating hours ofthe system has reached the levelnecessary for servicing.

The alarm is only active providedthe menu item "OperatingHours/Cycles” was changed toAlarm.

GA05135_0502 - 09/200490

Troubleshooting

Malfunction

Converter dead, LED “mains”does not light up after swit-ching on.

Display malfunction, confu-sing messages. No reactionwhen pressing keys.

Vacuum chamber pressurerises above normal backingpressure while the pump isstopped.

No purge gas flow

Base pressure not reached.

MAG 2000 CT does not heatup.

Display blurred.

Measures

Check the line voltage.

Contact Leybold service.

Switch the converter off and on again. If theconverter still malfunctions contact Leyboldservice.

Open and close purge gas and/or ventingvalve via control plug X14. LED on the valvemust light up and a clicking noise can beheard. Foreline pressure drops while the valveis closed.

Set purge flow according to specification.Open and close purge gas and/or ventingvalve via control plug X14. LED on the valvemust light up and a clicking noise can beheard. Foreline pressure drops while the valveis closed.

Leave the pump system run for 3 to 5 hoursto reach a pressure below 10-5 mbar.

See TMS failures.

Operate the converter according to the speci-fications.

Possible Cause

No power supply.

Fuse F1 blown or converter failure.

Converter failure.

Purge gas and venting valve open ormalfunctioning.

Valve malfunctioning.

Degassing surfaces of rotor and stator. Ifthe pump was stored in a humid environ-ment or was exposed to humid ambientair all surfaces will be covered with con-densation.

TMS failure.

Ambient temperature too high or too low.

5.3 Malfunctions

GA05135_0502 - 09/2004 91

Leybold Vacuum GmbHBonner Strasse 498 (Bayenthal)D-50968 ColognePhone: ++49 (0)221 347-0Fax: ++49 (0)221 347-1250documentation@leybold.com

vacuum

w w w . l e y b o l d . c o m

We - LEYBOLD Vacuum GmbH - herewith declare that operation of the incomplete machine defined below, is notpermissible until it has been determined that the machine into which this incomplete machine is to be installed,meets the regulations of the EEC Directive on Machinery.

When using the appropriate Leybold accessories, e.g. connector lines and when powering the pump with the spe-cified Leybold frequency converters, the protection level prescribed in the EMC Guidelines will be attained.

Designation: Turbomolecular pump MAG 2000 LINE

Applied harmonized standards:

EN 1012 – 2 1996

Cologne, Sept. 14, 2004

—————————————————————Ralf AdamietzHead of Design

EC Manufacturer’s Declarationin the spirit of Appendix IIb to the 98/37/EG Machinery Guidelines

Cologne, Sept. 14, 2004

—————————————————————Marcus EisenhuthVice-PresidentHead of Product Development

Part Nos.:

894 16894 17894 30894 31121 31121 32

400045Vxxxxx = 0 to 9

Models:

MAG 2000 CMAG W 2000 CMAG 2000 CTMAG W 2000 CT

MAG W 2010 CHTMAG W 2010 CMAG W 2011 CMAG 2000

GA05135_0502 - 09/200492

Leybold Vacuum GmbHBonner Strasse 498 (Bayenthal)D-50968 ColognePhone: ++49 (0)221 347-0Fax: ++49 (0)221 347-1250documentation@leybold.com

vacuum

w w w . l e y b o l d . c o m

EC Conformance Declaration

We, the Leybold Vacuum GmbH, declare herewith that the products listed below, in the embodiment which wehave placed on the market, comply with the applicable EC guidelines.

This declaration becomes invalid if modifications are made to the product without consultation with us.

Maintaining the EMC guideline assumes an EMC adapted installation of component within the plant or machine.

Test were run using a typical construction in a test assembly that conforms with the standards.

Time of the CE label (year): 2004

Designation of the products: Frequency converter / Plug-in control

Model: MAG.DRIVE 2000

Part No. 400034V0011 / 121 36

The products comply to the following guidelines:

EC Low-Voltage Equipment Guidelines (73/23/EWG and 93/68/EG

EC Directive on Electromagnetic Compatibility 89/336/EWG, 91/263/EWG, 92/31/EWG und 93/68/EWG

Related, harmonized standards:

EN 61010 - 1 2002

EN 61000-6-4 2001

EN 61000-6-2 2001

Cologne, Sept. 14, 2004

—————————————————————Manfred KiefferDevelopment Design

Cologne, Sept. 14, 2004

—————————————————————Marcus EisenhuthVice-PresidentHead of Product Development

GA05135_0502 - 09/2004

The system MAG 2000 LINE

turbomolecular pump

connecting cables

frequency converter

has been tested by the TÜV Rheinland of North America according to therequirements of

NRTL(used standards UL 61010A-1 and IEC 61010-1/A2) and

SEMI S2

The components are in compliance to the tested standards.

Certificate No. US 2271305 01, 02 and 03

vacuum

93

GA05135_0502 - 09/200494

vacuum

Declaration of Contamination of Compressors, Vacuum Pumps and ComponentsThe repair and / or servicing of compressors, vacuum pumps and components will be carried out only if a correctly completed declaration has been sub-mitted. Non-completion will result in delay. The manufacturer can refuse to accept any equipment without a declaration.A separate declaration has to be copleted for every single component.This declaration may be completed and signed only by authorised and qualified staff.

Customer/Dep./Institute: ________________________________

___________________________________________________

Address ___________________________________________

___________________________________________

Person to contact: ___________________________________

Phone: __________________ Fax: __________________

Order number of customer: ______________________________

Reason for returning " applicable please mark

# repair # chargeable # warranty

# Austausch # chargeable # warranty

# DKD-calibration # Factory calibration

restoring goods because of following reason:

# rent/loan # for credit # against exchange

# exchange already received/arranged

A. Description of the equipment (machine or component) Ancillary equipment

Type: _______________________________________ __________________________________________________

Part number: _______________________________________ __________________________________________________

Serial number: _______________________________________ __________________________________________________

Type of oil used: _______________________________________ __________________________________________________

B. Condition of the equipmentNo Yes No Contamination: No Yes

1. Has the equipment been used # # toxic # #2. Drained (Product/service fluid) # # corrosive # #3. All openings sealed airtight # mmicrobiological # #4. Purged # # explosive # #

If yes which cleaning agent: _______________________________________ radioactive # #and which method of cleaning: _______________________________________ other harmful substances # #

C. Description of processed substances (Please fill in absolutely)

1. What substances have come into contact with the equipment:Trade name and / or chemical term of service fluids and substances processed, properties of the substances; According to safety data sheet (e.g. toxic, inflammable, corrosive, radioactive)

Tradename: Chemical name: Residues:

a) ____________________________________________________________________________________ # Yes # No

b) ____________________________________________________________________________________ # Yes # No

c) ____________________________________________________________________________________ # Yes # No

d) ____________________________________________________________________________________ # Yes # NoYes No

2. Are these substances harmful? # #3. Dangerous decomposition products when thermally loaded # #

Which:

Components contaminated by microbiological, explosive or radioactive products will not be accepted without written evidence of decontamination.

D. Legally binding declarationI / we hereby declare that the information supplied on this form is accurate and sufficient to judge any contamination level.

Name of authorised person (block letters): ____________________________

date _____________ signatur of authorised person ___________________________firm stamp

© Leybold Vacuum Köln

GA05135_0502 - 09/2004 95

Form TMP-1 … Turbopump Field Failure ReportField Service IR No.: RMA No. (if returning to factory):

Service Center:

Customer:

Turbopump Model: Turbopump Pump Part Number:

Turbopump Serial Number:

Complaint:

Process:

OEM Equipment Name and Model:

Process Gas:

Was the turbopump replaced? Yes; No.

If yes, replacement pump P/N: replacement pump S/N:

Date Installed: Date Removed:

Date Received:

Date Examined: Examined by:

Received Condition:

Findings:

Cause of Failure:

Recommendations:

Remarks/Questions:

vacuum

Fax to: Service LVFax#: (0049) 221 347 1945

GA05135_0502 - 09/200496

MAG 1600 C, CTMAG W 1600 C, CT

MAG 2000 C, CTMAG W 2000 C, CT

MAG.DRIVE L

MAG.DRIVE L2

GA 05.130/3.02

(May 1998)

MAG W 2010 C MAG.DRIVE 2000GA 05.136/3.02

(July 2003)

Operating Instructions for MAG 2000 seriesOperating

Instructions in English

Valid for pumps Valid for Converters

MAG 1600 C, CTMAG W 1600 C, CT

MAG 2000 C, CTMAG W 2000 C, CT

MAG.DRIVE 2000GA 05.135/4.02

(July 2003)

MAG W 2010 CHT MAG.DRIVE 2000GA 05.139/2.02

(July 2003)

GA 05.130/3.01

(August 1999)

Operating Instructions in German

MAG W 2000 –KA 05.144/1

Suppl. for GA 05.135

(November 1999)

MAG W 2020 C –KA 05.143/1

Suppl. for GA05.136

(November 1999)

MAG 2000 CMAG W 2000 CMAG 2000 CT

MAG W 2000 CTMAG W 2010 CHT

MAG W 2010 CMAG W 2011 C

MAG 2000

MAG.DRIVE 2000

from software version1.05.00

GA05135_0502

(Sept. 2004)

GA05135_0501

(Sept. 2004)

GA05135_0502 - 09/2004 97

Index

IndexAacceleration 54, 55, 65, 67-71, 73,

74, 82, 85, 86

ambient temperature 15, 16, 32, 82,85, 90

Bbacking pressure 36, 83, 86, 90

backing pump 15, 16, 36, 64, 67, 68,78

Ccontamination 17, 78, 80, 94

cooling water 15, 16, 19, 30, 31, 38-42, 54, 61, 64, 67, 68, 72, 73, 76,78, 80, 82-86, 88

corrosive 7, 9, 64, 68, 78, 94

Ddangerous voltage 5

data storage 10, 72, 73

DC motor 10, 12

deceleration 54, 55, 65, 68, 70, 71,82, 85

deposits 9, 43, 82-85, 88

dimensions 21-29

dripping water 50

Eearthquake protection 35

emergency off 2, 54, 55, 83, 87

explosive 9, 94

Fforevacuum 4, 14-16, 19, 30, 31, 36,

37, 47, 60, 63, 77, 78, 80

forevacuum flange 14, 30, 31, 36

fuse 14, 17, 50, 87, 90

Ggenerate 9

Hhazardous gases 37, 78

hazardous voltages 50-52

hot components 5, 35

Iintake flange 14, 30, 31, 33, 34, 78

Kkey 59, 64, 67-70, 83

LLED 12, 44-46, 64, 65, 82, 83, 85, 88,

90

Mmagnetic bearing 7, 10, 12, 13, 52,

59, 72, 83, 86, 87

magnetic field 32

mains 5, 12, 13, 50-53, 59, 61, 70,71, 78, 81, 83, 90

media 9, 43

motor current 54, 55, 63, 69, 73, 76,87

motor temperature 55, 72, 82, 84, 87

Nnoise level 32

Ooperating status 68, 69

ordering data 18, 20

PPE bag 14, 32, 33, 80

Pk 83

plug-in control 7, 12, 13, 18, 56, 67-76, 92, 93

Pumping speed 10, 15, 16, 18

purge gas 9, 17-19, 30, 31, 36, 43-49,54-56, 59, 60, 64, 67, 68, 73, 79,83, 86, 90

Purge/Vent 45, 74, 76

Rradiation 32, 63

relay 12, 17, 54, 55, 62, 70, 73, 76

remote control 12, 65, 81

Sseal kit 14, 18, 78, 79

serial interface 12, 51, 56, 68, 73

shock 36, 59, 83, 86

splinter guard 14-16, 18, 33, 34

Ttechnical data 15-17, 46

temperature sensor 19, 82-88

TMS 7, 9, 12-14, 19, 20, 30, 36, 50-56, 61, 62, 64, 67, 69, 72-74, 76,83, 84, 86-88, 90, 93

torque 4, 33, 34, 36, 77

touch-down bearings 59, 77

transport seal 14, 33, 85

Vventing 15, 16, 34, 36, 43-46, 48, 55,

60, 68, 76, 83, 86, 90

vibration 10, 35, 36, 85, 86

LV_0

6933

_200

4

0

9.04

Prin

ted

in G

erm

any

on c

hlor

ine-

free

blea

ched

pap

erTe

chni

cal a

ltera

tions

res

erve

d

Leybold Vacuum GmbHBonner Strasse 498 (Bayenthal)D-50968 ColognePhone: ++49 (0)221 347-0Fax: ++49 (0)221 347-1250documentation@leybold.com

vacuum

w w w . l e y b o l d . c o m

AMERICASEUROPE ASIA

Sales and Service Net Worldwide

USA:Leybold Vacuum USA Inc.5700 Mellon RoadExport, PA 15632info@leyboldvacuum.com

Sales:Eastern & Central time zonesPhone: +1-724-327-5700 Fax: +1-724-733-1217 Pacific, Mountain, Alaskan & Hawaiian time zonesPhone: +1-480-752-9191 Fax: +1-480-752-9494

Service:Phone: +1-724-327-5700 Fax: +1-724-733-3799

Germany:Leybold VacuumBonner Strasse 498(Bayenthal)D-50968 Colognesales@leybold.comPhone: +49-221-347 1234Fax: +49-221-347 1245

Leybold VacuumService CenterEmil-Hoffmann-Strasse 4350996 Cologne-Suerthservice@leybold.comPhone: +49-221-347 14 39Fax: +49-221-347 19 45

Belgium:Leybold Vacuum Nederland B.V.Belgisch bijkantoorLeuvensesteenweg 542,9A1930 Zaventeminfo@leybold.beSales:Phone: +32-2-711 00 83Fax: +32-2-720 83 38Service:Phone: +32-2-711 00 82Fax: +32-2-720 83 38

France:Leybold Vacuum France S.A.7, Avenue du QuebecZ.A. de Courtaboeuf, B. P.4291942 Courtaboeuf Cedexleybold-vacuum@leybold.frSales and Service:Phone: +33-1-69 82 48 00Fax: +33-1-69 07 57 38

Great Britain:Leybold Vacuum UK Ltd.Waterside Way, PloughLaneLondon SW17 0HBSales:sales@leybold.co.ukPhone: +44-20-8971 7000Fax: +44-20-8971 7001Service:service@leybold.co.ukPhone: +44-20-8971 7030Fax: +44-20-8971 7003

Italy:Leybold VacuumItalia S.p.A.8, Via Trasimeno 20128 MilanoSales:sales@leybold.itPhone: +39-02-27 22 31Fax: +39-02-27 20 96 41Service:service@leybold.itPhone: +39-02-27 22 31Fax: +39-02-27 20 96 41

Netherlands:Leybold Vacuum Nederland B.V.Computerweg 73542 DP Utrechte-mail: mail@leybold.nlSales and Service:Phone: +31-346-58 39 99Fax: +31-346-58 39 90

Spain:Leybold Vacuum España S.A.C/. Huelva, 708940 Cornella deLlobregat (Barcelona)leybold@leyboldspain.comSales:Phone: +34-93-666 46 16Fax: +34-93-666 43 70Service:Phone: +34-93-666 49 51Fax: +34-93-685 40 10

Sweden:Leybold Vacuum Scandinavia ABBox 908440092 Göteborginfo@leybold.seSales and Service:Phone: +46-31-68 84 70Fax: +46-31-68 39 39

Switzerland:Leybold Vacuum Schweiz AGLeutschenbachstrasse 558050 Zürichsales@leybold.chSales:Phone: +41-1-308 40 50Fax: +41-1-302 43 73Service:Phone: +41-1-308 40 62Fax: +41-1-302 40 60

P.R. China:Leybold Vacuum(Tianjin) International Trade Co.,Ltd.Beichen EconomicDevelopment Area(BEDA), Tianjin,300400, China.Phone: +86-22-26970808Fax: +86-22-26974061,Fax: +86-22-26972017leybold@leybold.com.cn

Leybold (Tianjin) Vacuum EquipmentManufacturing Co. LtdBeichen EconomicDevelopment Area(BEDA), Tianjin, 300400, China.Phone: +86-22-26970808Fax: +86-22-26974061Fax: +86-22-26972017leybold@leybold.com.cn

Leybold Vacuum(Tianjin) International Trade Co.,Ltd.Shanghai Branch:Add: No.33, 76 FutedongSan Rd., WaigaoqiaoFTZ, Shanghai, 200131, China.Phone: +86-21-5064-4666Fax: +86-21-5064-4668leybold_sh@leybold.com.cn

Leybold (Tianjin) Vacuum EquipmentManufacturing Co.Ltd.Guangzhou Branch:Add: G/F,#301 Building, 110 DongguangzhuangRd, TianheDistrict,Guangzhou510610, China.Phone: +86-20-8723-7873Phone : +86-20-8723-7597Fax: +86-20-87237875leybold_gz@leybold.com.cn

Japan: Sales:Leybold Vacuum Japan Co., Ltd.Head OfficeTobu A.K.Bldg.4th Floor 23-3, Shin-Yokohama 3-chomeKohoku-ku, Yokohama-shiKanagawa-ken 222-0033Phone: +81-45-4713330Fax: +81-45-4713323

Sales:Leybold Vacuum Japan Co., Ltd.Osaka Branch OfficeMURATA Bldg.7F2-7-53, Nihi-Miyahara,Yodogawa-ku Osaka-shi 532-0004Phone: +81-6-6393-5211Fax: +81-6-6393-5215

Service:Leybold Vacuum Japan Co., Ltd.Tsukuba Technical S.C.Tsukuba Minami Daiichi Kogyo Danchi21, Kasumi-no-Sato, Ami-machi nashiki-gunIbaraki-ken, 300-0315Tel.: +81-298-89-2841Fax: +81-298-89-2838

Korea:Leybold VacuumKorea Ltd.#761-47, Yulkeum-ri,SungHwan-eup, ChonanChoongchung-Namdo,330-807, KoreaSales:Tel.: +82-41-580-4431Fax: +82-41-588-3737Service Center:Phone: +82-41-588-3765Fax: +82-41-588-3769

Singapore:Leybold VacuumSingapore Pte Ltd. No.1, International Business Park,B1-20B, The SynergySingapore 609917Phone: +65-66652910Fax: +65-65668202vacuum@leyboldvac.com.sg

Taiwan:Leybold VacuumTaiwan Ltd.2F, No 416-1, Sec.3Chung-Hsin Rd., Chu-TungHsin-Chu, Taiwan, R.O.C.Phone: +886-3-5833988Fax: +886-3-5833999