操作盘 Operation Panel

支持反应溅镀 DC 电源

DC POWER SUPPLIES FOR REACTIVE SPUTTERING

规 格 Specification

型号 MODEL HPK 01Z HPK 03Z HPK06Z HPK10Z HPK15Z

输入

IN

PU

T

额定电压 Rated voltage(AC) 200V／220V

频率 Frequency 50Hz or 60Hz

相数 Phase／Line 3 相 3 线制 3 Phase／3 Lines

电压施加可能范围 Input voltage range

190V~242V

输出

O

UT

PU

T

额定功率 Rated power(kW) 1 3 6 10 15

额定电压 Rated voltage(V) 1000／500(*2)

额定电流 Rated current(A) 1.7／3.4(*2) 5／10(*2) 10／20(*2) 17.3／33.3(*2) 25／50(*2)

额定功率供给可能电压范围

Output voltage range(V) 600~1000／300~500(*2)

点火电压 Ignition voltage(V) 1500／750(*2)

调整 Regulation ±1% (*1)

脉动电压 Ripple voltage 2%rms

冷却方式 Cooling system 强制风冷 Forced air cooling

动作周围温度范围 Operating temperature 0℃~40℃

外型尺寸 Physical dimension W×D×H(mm) 480×500×100 480×500×100 480×500×125 480×600×150 480×600×175

概约重量 Weight(approx./kg) 15 30 35 45 60

(*1) 恒定功率控制时为±2% ±2% under constant-power control. (*2) 出货时选择 select at shipment.

选配单元 Option Unit

__ _ ___无弧器 Arc-less ___ __

POWER SYSTEM

京上贸易(上海)有限公司 TAIKYO TRADE (SHANGHAI).Co.,Ltd.

ADD: 200444 上海宝山城市工业园区城银路 51 号 No.51 Chengyin Road, Baoshan Industrial Garden, Shanghai P.R.China TEL: +86 21 3651 7698 FAX: +86 21 3651 7634

DC POWER SUPPLIES for REACTIVE SPUTTERING

1kW-75kW

本系列之 DC 溅镀电源以新概念而设计，能支持多种电浆负载。藉由使用搭载了新型回路的无弧器（专利 PAT

H08-222398）来防止粒子级电弧产生，能够支持优秀的反应溅镀。

此外，透过标准配备智能功能及采用微电脑数控，实现高精度、高反应且具极高安全性，提升过程的再现性。

The DC Power supplies for sputtering of this series are designed by new concept to match various kinds of plasma loads. It is enabled to match reactive sputtering by using new circuitry (PAT H08-222398) which is called as arc-less and can prevent arc generation even at particle level. Also, the high accuracy, high-speed response and still more, extremely high stability are realized by being equipped with the

intelligent functions as standard and adopting numerical controls by microcomputer, then repeatability of the process will be enhanced.

保 护 Protection

为防止负载的断路/短路，搭载电压、电流、功率的各种垂

下保护功能。此外，启动时及运转中发生异常时会停止运作，

并于屏幕显示异常。

To protect open or short circuit at load, the fold-back protection function is equipped for the voltage, current and power respectively. Also, if unusual operation occurs during its starting up or system operation, the current operation can stop and the information will be displayed on the screen.

信 誉 Confidence

京三多年来的实绩，充分发挥最新技术使电路安定化，

并在设计时间即慎选零件，对用户们有良好的信誉及质

量的保证。

Kyosan's actual result for a long time assures the users of the high reliability and quality assurance by stabilizing the circuitries fully utilizing the latest technologies and severely selecting the parts at their design process.

特 长 Features

微电脑数控达到高性能化的同时，并透过高频转换技术实现小型、轻量

化。

运转模式可选择恒定电压控制、恒定电流控制、恒定功率控制，恒定功

率运转时可用无分接头设定额定功率。此外，对于负载的异常放电，考

虑藉由高速的电路断开和无弧功能，在保护负载的同时，让异常放电的

恢复也非常顺畅。

此外，各容量的电源机组与主要装置连接从属装置，最多可并行运转 5

台。又，主要装置的显示操作部最远可摇控操作 100 公尺。

The excellent performance is achieved by means of numerical control by microcomputer as well as the compact size and lightweight are realized by high frequency switching technologies. For choice of its operation modes, fixed-voltage, fixed-current and fixed-power controls are available, and it is possible to set the rated power at seamless level in fixed-power

operation. Also, it is supported to protect the load against irregular discharges at its load by the high-speed shut-down circuit and arc-less function as well as to recover from the irregular discharges quite smoothly. Furthermore, parallel operation, up to 5 units is available for each capacity of the power supplies by connecting slave systems to the master system. It is noted that remote operation, up to 100m is allowed for control/display part of the master system.

功 能 Function

操作方式全于正面面板上，也可以使用 RS232C 的

通讯功能进行设定。

● 运转类型控制功能可登录 5 种类型，1 个类型最多可设

定 15 个函数。

● 各种控制量限制值可独立设定电压、电流、功率。

● 根据点火电压及电流的设定功能，可识别电浆点火。

● 可设定及选择短路电压、电流值和断路电压、电流值。

● 当电弧发生，而设定及选择为 Shut Down 时，会立刻停

止，停止一定时间后(0.5ms～1s)，会自动重新启动，继

续运转。此时若再次发生电弧的话会立刻停止，重复上

列动作的同时会进行电弧次数的累计。

● 缓启动功能，是指输出上升值(0~100%)在到达时间的设

定功能下，能够以 0s~9999s 设定。

● 通电时间记忆功能会累计电源通电的时间。

● 累计功率记忆功能以累计输出功率时间管理、显示负载

端的目标寿命。

● 无弧功能可选择连续、1 脉波以及通过模式。

The operation is fully controlled by either the front

panel or RS-232C communication interface.

● For the control function of operation patterns, 5 types of the

patterns can be registered and up to 15 functions per pattern can be defined.

● For each limit of controlled variable, it is possible to set the voltage, current and power independently.

● Ignition of plasma can be recognized by the function to set the ignition voltage and current.

● It is possible to set and select the short voltage and current as well as the open voltage and current.

● The function to set and select the shut-down support at arcing generation makes it possible to stop the system as soon as arcing is detected and restart it automatically at regular interval (0.5ms~1 s) to continue the operation. In this case, if arcing is generated again, the system stops immediately and the sequence is repeated as well as the total number of the arc generations is counted.

● For soft-starting, it is allowed to set rise time of the output value

(O~100%) for 0~9999 Sec. by its setting function. ● Operating time is summed up by its recording function for the

time when power is ON. ● The recording function of power accumulation manages and

displays the target life at the load side by summing up the time of power output.

● The arc-less function provides the choice of Continuous, Single pulse or Through mode.

应 用 Application

在DC电压的广泛范围内，适合额定功率的供给及高速电弧遮断功能不可

或缺的光学膜(SO、TOx)、耐磨耗膜(SiOx、Al2O3)以及透明导电膜(ITO)

的成膜等。

无弧的脉波频率选择、电弧次数、目标寿命、点火电压选择及断路/短

路判断等，标准配备多种功能。此外，可单机使用或复数台(主要装置、

从属装置)与DC+RF电源等复合使用。

It is most suitable to fabricate films such as optical films (SiOx,

TiOx), films for abrasion resistance (SiOx, Ah03) and transparent conductive films (ITO), that absolutely needs the supplies of the fixed power at wide range of DC voltages and high-speed arc shut-down function. It equips various kinds of functions as standard such as frequency selection of arc-less pulse, number of arc generations, target life, selection of ignition voltage and detection of open or short. Also, it is allowed to use it alone, multiple units (master/slave) and mixed units such as DC and RF power supplies.

DC POWER SUPPLIES for REACTIVE SPUTTERING

1kW-75kW

本系列之 DC 溅镀电源以新概念而设计，能支持多种电浆负载。藉由使用搭载了新型回路的无弧器（专利 PAT

H08-222398）来防止粒子级电弧产生，能够支持优秀的反应溅镀。

此外，透过标准配备智能功能及采用微电脑数控，实现高精度、高反应且具极高安全性，提升过程的再现性。

The DC Power supplies for sputtering of this series are designed by new concept to match various kinds of plasma loads. It is enabled to match reactive sputtering by using new circuitry (PAT H08-222398) which is called as arc-less and can prevent arc generation even at particle level. Also, the high accuracy, high-speed response and still more, extremely high stability are realized by being equipped with the

intelligent functions as standard and adopting numerical controls by microcomputer, then repeatability of the process will be enhanced.

保 护 Protection

为防止负载的断路/短路，搭载电压、电流、功率的各种垂

下保护功能。此外，启动时及运转中发生异常时会停止运作，

并于屏幕显示异常。

To protect open or short circuit at load, the fold-back protection function is equipped for the voltage, current and power respectively. Also, if unusual operation occurs during its starting up or system operation, the current operation can stop and the information will be displayed on the screen.

信 誉 Confidence

京三多年来的实绩，充分发挥最新技术使电路安定化，

并在设计时间即慎选零件，对用户们有良好的信誉及质

量的保证。

Kyosan's actual result for a long time assures the users of the high reliability and quality assurance by stabilizing the circuitries fully utilizing the latest technologies and severely selecting the parts at their design process.

特 长 Features

微电脑数控达到高性能化的同时，并透过高频转换技术实现小型、轻量

化。

运转模式可选择恒定电压控制、恒定电流控制、恒定功率控制，恒定功

率运转时可用无分接头设定额定功率。此外，对于负载的异常放电，考

虑藉由高速的电路断开和无弧功能，在保护负载的同时，让异常放电的

恢复也非常顺畅。

此外，各容量的电源机组与主要装置连接从属装置，最多可并行运转 5

台。又，主要装置的显示操作部最远可摇控操作 100 公尺。

The excellent performance is achieved by means of numerical control by microcomputer as well as the compact size and lightweight are realized by high frequency switching technologies. For choice of its operation modes, fixed-voltage, fixed-current and fixed-power controls are available, and it is possible to set the rated power at seamless level in fixed-power

operation. Also, it is supported to protect the load against irregular discharges at its load by the high-speed shut-down circuit and arc-less function as well as to recover from the irregular discharges quite smoothly. Furthermore, parallel operation, up to 5 units is available for each capacity of the power supplies by connecting slave systems to the master system. It is noted that remote operation, up to 100m is allowed for control/display part of the master system.

功 能 Function

操作方式全于正面面板上，也可以使用 RS232C 的

通讯功能进行设定。

● 运转类型控制功能可登录 5 种类型，1 个类型最多可设

定 15 个函数。

● 各种控制量限制值可独立设定电压、电流、功率。

● 根据点火电压及电流的设定功能，可识别电浆点火。

● 可设定及选择短路电压、电流值和断路电压、电流值。

● 当电弧发生，而设定及选择为 Shut Down 时，会立刻停

止，停止一定时间后(0.5ms～1s)，会自动重新启动，继

续运转。此时若再次发生电弧的话会立刻停止，重复上

列动作的同时会进行电弧次数的累计。

● 缓启动功能，是指输出上升值(0~100%)在到达时间的设

定功能下，能够以 0s~9999s 设定。

● 通电时间记忆功能会累计电源通电的时间。

● 累计功率记忆功能以累计输出功率时间管理、显示负载

端的目标寿命。

● 无弧功能可选择连续、1 脉波以及通过模式。

The operation is fully controlled by either the front

panel or RS-232C communication interface.

● For the control function of operation patterns, 5 types of the

patterns can be registered and up to 15 functions per pattern can be defined.

● For each limit of controlled variable, it is possible to set the voltage, current and power independently.

● Ignition of plasma can be recognized by the function to set the ignition voltage and current.

● It is possible to set and select the short voltage and current as well as the open voltage and current.

● The function to set and select the shut-down support at arcing generation makes it possible to stop the system as soon as arcing is detected and restart it automatically at regular interval (0.5ms~1 s) to continue the operation. In this case, if arcing is generated again, the system stops immediately and the sequence is repeated as well as the total number of the arc generations is counted.

● For soft-starting, it is allowed to set rise time of the output value

(O~100%) for 0~9999 Sec. by its setting function. ● Operating time is summed up by its recording function for the

time when power is ON. ● The recording function of power accumulation manages and

displays the target life at the load side by summing up the time of power output.

● The arc-less function provides the choice of Continuous, Single pulse or Through mode.

应 用 Application

在DC电压的广泛范围内，适合额定功率的供给及高速电弧遮断功能不可

或缺的光学膜(SO、TOx)、耐磨耗膜(SiOx、Al2O3)以及透明导电膜(ITO)

的成膜等。

无弧的脉波频率选择、电弧次数、目标寿命、点火电压选择及断路/短

路判断等，标准配备多种功能。此外，可单机使用或复数台(主要装置、

从属装置)与DC+RF电源等复合使用。

It is most suitable to fabricate films such as optical films (SiOx,

TiOx), films for abrasion resistance (SiOx, Ah03) and transparent conductive films (ITO), that absolutely needs the supplies of the fixed power at wide range of DC voltages and high-speed arc shut-down function. It equips various kinds of functions as standard such as frequency selection of arc-less pulse, number of arc generations, target life, selection of ignition voltage and detection of open or short. Also, it is allowed to use it alone, multiple units (master/slave) and mixed units such as DC and RF power supplies.

操作盘 Operation Panel

支持反应溅镀 DC 电源

DC POWER SUPPLIES FOR REACTIVE SPUTTERING

规 格 Specification

型号 MODEL HPK 01Z HPK 03Z HPK06Z HPK10Z HPK15Z

输入

IN

PU

T

额定电压 Rated voltage(AC) 200V／220V

频率 Frequency 50Hz or 60Hz

相数 Phase／Line 3 相 3 线制 3 Phase／3 Lines

电压施加可能范围 Input voltage range

190V~242V

输出

O

UT

PU

T

额定功率 Rated power(kW) 1 3 6 10 15

额定电压 Rated voltage(V) 1000／500(*2)

额定电流 Rated current(A) 1.7／3.4(*2) 5／10(*2) 10／20(*2) 17.3／33.3(*2) 25／50(*2)

额定功率供给可能电压范围

Output voltage range(V) 600~1000／300~500(*2)

点火电压 Ignition voltage(V) 1500／750(*2)

调整 Regulation ±1% (*1)

脉动电压 Ripple voltage 2%rms

冷却方式 Cooling system 强制风冷 Forced air cooling

动作周围温度范围 Operating temperature 0℃~40℃

外型尺寸 Physical dimension W×D×H(mm) 480×500×100 480×500×100 480×500×125 480×600×150 480×600×175

概约重量 Weight(approx./kg) 15 30 35 45 60

(*1) 恒定功率控制时为±2% ±2% under constant-power control. (*2) 出货时选择 select at shipment.

选配单元 Option Unit

__ _ ___无弧器 Arc-less ___ __

POWER SYSTEM

京上贸易(上海)有限公司 TAIKYO TRADE (SHANGHAI).Co.,Ltd.

ADD: 200444 上海宝山城市工业园区城银路 51 号 No.51 Chengyin Road, Baoshan Industrial Garden, Shanghai P.R.China TEL: +86 21 3651 7698 FAX: +86 21 3651 7634